11/10/2010	11:26:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	11:26:57 AM	Recipe started at 11:26 AM
11/10/2010	11:26:57 AM	H2 valve closed
11/10/2010	11:26:57 AM	BCl3 valve closed
11/10/2010	11:26:57 AM	PH3 valve closed
11/10/2010	11:26:57 AM	SiCl4 pre valve closed
11/10/2010	11:26:57 AM	SiCl4 post valve closed
11/10/2010	11:26:57 AM	Main Vac valve closed
11/10/2010	11:26:57 AM	Bypass valve closed
11/10/2010	11:26:57 AM	Bubbler valve closed
11/10/2010	11:26:57 AM	Helium valve opened
11/10/2010	11:26:57 AM	Helium MFC set to  500.000000
11/10/2010	11:26:57 AM	H2 MFC set to  0.000000
11/10/2010	11:26:57 AM	BCl3 MFC set to  0.000000
11/10/2010	11:26:57 AM	PHl3 MFC set to  0.000000
11/10/2010	11:26:57 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:26:57 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:26:58 AM	Tube furnace set to 0
11/10/2010	11:28:18 AM	Helium valve closed
11/10/2010	11:28:18 AM	H2 valve closed
11/10/2010	11:28:18 AM	BCl3 valve closed
11/10/2010	11:28:18 AM	PH3 valve closed
11/10/2010	11:28:18 AM	SiCl4 pre valve closed
11/10/2010	11:28:18 AM	SiCl4 post valve closed
11/10/2010	11:28:18 AM	Main Vac valve closed
11/10/2010	11:28:18 AM	Bypass valve closed
11/10/2010	11:28:18 AM	Bubbler valve closed
11/10/2010	11:28:18 AM	Helium MFC set to  0.000000
11/10/2010	11:28:18 AM	H2 MFC set to  0.000000
11/10/2010	11:28:18 AM	BCl3 MFC set to  0.000000
11/10/2010	11:28:18 AM	PHl3 MFC set to  0.000000
11/10/2010	11:28:18 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:28:18 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:28:18 AM	Tube furnace set to 0
11/10/2010	11:28:18 AM	Run finished at 11:28 AM
11/10/2010	11:28:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	11:51:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	11:51:52 AM	Recipe started at 11:51 AM
11/10/2010	11:51:52 AM	Helium valve closed
11/10/2010	11:51:52 AM	H2 valve closed
11/10/2010	11:51:52 AM	BCl3 valve closed
11/10/2010	11:51:52 AM	PH3 valve closed
11/10/2010	11:51:52 AM	SiCl4 pre valve closed
11/10/2010	11:51:52 AM	SiCl4 post valve closed
11/10/2010	11:51:52 AM	Main Vac valve closed
11/10/2010	11:51:52 AM	Bubbler valve closed
11/10/2010	11:51:52 AM	Bypass valve opened
11/10/2010	11:51:52 AM	Helium MFC set to  0.000000
11/10/2010	11:51:52 AM	H2 MFC set to  0.000000
11/10/2010	11:51:52 AM	BCl3 MFC set to  0.000000
11/10/2010	11:51:52 AM	PHl3 MFC set to  0.000000
11/10/2010	11:51:52 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:51:52 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:51:52 AM	Tube furnace set to 0
11/10/2010	11:52:44 AM	Helium valve closed
11/10/2010	11:52:44 AM	H2 valve closed
11/10/2010	11:52:44 AM	BCl3 valve closed
11/10/2010	11:52:44 AM	PH3 valve closed
11/10/2010	11:52:44 AM	SiCl4 pre valve closed
11/10/2010	11:52:44 AM	SiCl4 post valve closed
11/10/2010	11:52:44 AM	Bubbler valve closed
11/10/2010	11:52:44 AM	Main Vac valve opened
11/10/2010	11:52:44 AM	Bypass valve opened
11/10/2010	11:52:44 AM	Helium MFC set to  0.000000
11/10/2010	11:52:44 AM	H2 MFC set to  0.000000
11/10/2010	11:52:44 AM	BCl3 MFC set to  0.000000
11/10/2010	11:52:44 AM	PHl3 MFC set to  0.000000
11/10/2010	11:52:44 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:52:44 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:52:44 AM	Tube furnace set to 0
11/10/2010	11:52:45 AM	Run finished at 11:52 AM
11/10/2010	11:52:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	11:52:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	11:53:01 AM	Recipe started at 11:52 AM
11/10/2010	11:53:01 AM	Helium valve closed
11/10/2010	11:53:01 AM	H2 valve closed
11/10/2010	11:53:01 AM	BCl3 valve closed
11/10/2010	11:53:01 AM	PH3 valve closed
11/10/2010	11:53:01 AM	SiCl4 pre valve closed
11/10/2010	11:53:01 AM	SiCl4 post valve closed
11/10/2010	11:53:01 AM	Main Vac valve closed
11/10/2010	11:53:01 AM	Bubbler valve closed
11/10/2010	11:53:01 AM	Bypass valve opened
11/10/2010	11:53:01 AM	Helium MFC set to  0.000000
11/10/2010	11:53:01 AM	H2 MFC set to  0.000000
11/10/2010	11:53:01 AM	BCl3 MFC set to  0.000000
11/10/2010	11:53:01 AM	PHl3 MFC set to  0.000000
11/10/2010	11:53:01 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:53:01 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:53:01 AM	Tube furnace set to 0
11/10/2010	11:53:02 AM	Helium valve closed
11/10/2010	11:53:02 AM	H2 valve closed
11/10/2010	11:53:02 AM	BCl3 valve closed
11/10/2010	11:53:02 AM	PH3 valve closed
11/10/2010	11:53:02 AM	SiCl4 pre valve closed
11/10/2010	11:53:02 AM	SiCl4 post valve closed
11/10/2010	11:53:02 AM	Bubbler valve closed
11/10/2010	11:53:02 AM	Main Vac valve opened
11/10/2010	11:53:02 AM	Bypass valve opened
11/10/2010	11:53:02 AM	Helium MFC set to  0.000000
11/10/2010	11:53:02 AM	H2 MFC set to  0.000000
11/10/2010	11:53:02 AM	BCl3 MFC set to  0.000000
11/10/2010	11:53:02 AM	PHl3 MFC set to  0.000000
11/10/2010	11:53:02 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:53:02 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:53:02 AM	Tube furnace set to 0
11/10/2010	11:54:02 AM	H2 valve closed
11/10/2010	11:54:02 AM	BCl3 valve closed
11/10/2010	11:54:02 AM	PH3 valve closed
11/10/2010	11:54:02 AM	SiCl4 pre valve closed
11/10/2010	11:54:02 AM	SiCl4 post valve closed
11/10/2010	11:54:02 AM	Bubbler valve closed
11/10/2010	11:54:02 AM	Helium valve opened
11/10/2010	11:54:02 AM	Main Vac valve opened
11/10/2010	11:54:02 AM	Bypass valve opened
11/10/2010	11:54:02 AM	Helium MFC set to  100.000000
11/10/2010	11:54:02 AM	H2 MFC set to  0.000000
11/10/2010	11:54:02 AM	BCl3 MFC set to  0.000000
11/10/2010	11:54:02 AM	PHl3 MFC set to  0.000000
11/10/2010	11:54:02 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:54:02 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:54:02 AM	Tube furnace set to 0
11/10/2010	11:55:02 AM	Helium valve closed
11/10/2010	11:55:02 AM	H2 valve closed
11/10/2010	11:55:02 AM	BCl3 valve closed
11/10/2010	11:55:02 AM	PH3 valve closed
11/10/2010	11:55:02 AM	SiCl4 pre valve closed
11/10/2010	11:55:02 AM	SiCl4 post valve closed
11/10/2010	11:55:02 AM	Bubbler valve closed
11/10/2010	11:55:02 AM	Main Vac valve opened
11/10/2010	11:55:02 AM	Bypass valve opened
11/10/2010	11:55:02 AM	Helium MFC set to  0.000000
11/10/2010	11:55:02 AM	H2 MFC set to  0.000000
11/10/2010	11:55:02 AM	BCl3 MFC set to  0.000000
11/10/2010	11:55:02 AM	PHl3 MFC set to  0.000000
11/10/2010	11:55:02 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:55:02 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:55:02 AM	Tube furnace set to 0
11/10/2010	11:56:02 AM	H2 valve closed
11/10/2010	11:56:02 AM	BCl3 valve closed
11/10/2010	11:56:02 AM	PH3 valve closed
11/10/2010	11:56:02 AM	SiCl4 pre valve closed
11/10/2010	11:56:02 AM	SiCl4 post valve closed
11/10/2010	11:56:02 AM	Bubbler valve closed
11/10/2010	11:56:02 AM	Helium valve opened
11/10/2010	11:56:02 AM	Main Vac valve opened
11/10/2010	11:56:02 AM	Bypass valve opened
11/10/2010	11:56:02 AM	Helium MFC set to  100.000000
11/10/2010	11:56:02 AM	H2 MFC set to  0.000000
11/10/2010	11:56:02 AM	BCl3 MFC set to  0.000000
11/10/2010	11:56:02 AM	PHl3 MFC set to  0.000000
11/10/2010	11:56:02 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:56:02 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:56:02 AM	Tube furnace set to 0
11/10/2010	11:57:02 AM	Helium valve closed
11/10/2010	11:57:02 AM	H2 valve closed
11/10/2010	11:57:02 AM	BCl3 valve closed
11/10/2010	11:57:02 AM	PH3 valve closed
11/10/2010	11:57:02 AM	SiCl4 pre valve closed
11/10/2010	11:57:02 AM	SiCl4 post valve closed
11/10/2010	11:57:02 AM	Bubbler valve closed
11/10/2010	11:57:02 AM	Main Vac valve opened
11/10/2010	11:57:02 AM	Bypass valve opened
11/10/2010	11:57:02 AM	Helium MFC set to  0.000000
11/10/2010	11:57:03 AM	H2 MFC set to  0.000000
11/10/2010	11:57:03 AM	BCl3 MFC set to  0.000000
11/10/2010	11:57:03 AM	PHl3 MFC set to  0.000000
11/10/2010	11:57:03 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:57:03 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:57:03 AM	Tube furnace set to 0
11/10/2010	11:58:03 AM	H2 valve closed
11/10/2010	11:58:03 AM	BCl3 valve closed
11/10/2010	11:58:03 AM	PH3 valve closed
11/10/2010	11:58:03 AM	SiCl4 pre valve closed
11/10/2010	11:58:03 AM	SiCl4 post valve closed
11/10/2010	11:58:03 AM	Bubbler valve closed
11/10/2010	11:58:03 AM	Helium valve opened
11/10/2010	11:58:03 AM	Main Vac valve opened
11/10/2010	11:58:03 AM	Bypass valve opened
11/10/2010	11:58:03 AM	Helium MFC set to  100.000000
11/10/2010	11:58:03 AM	H2 MFC set to  0.000000
11/10/2010	11:58:03 AM	BCl3 MFC set to  0.000000
11/10/2010	11:58:03 AM	PHl3 MFC set to  0.000000
11/10/2010	11:58:03 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:58:03 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:58:03 AM	Tube furnace set to 0
11/10/2010	11:59:03 AM	Helium valve closed
11/10/2010	11:59:03 AM	H2 valve closed
11/10/2010	11:59:03 AM	BCl3 valve closed
11/10/2010	11:59:03 AM	PH3 valve closed
11/10/2010	11:59:03 AM	SiCl4 pre valve closed
11/10/2010	11:59:03 AM	SiCl4 post valve closed
11/10/2010	11:59:03 AM	Bubbler valve closed
11/10/2010	11:59:03 AM	Main Vac valve opened
11/10/2010	11:59:03 AM	Bypass valve opened
11/10/2010	11:59:03 AM	Helium MFC set to  0.000000
11/10/2010	11:59:03 AM	H2 MFC set to  0.000000
11/10/2010	11:59:03 AM	BCl3 MFC set to  0.000000
11/10/2010	11:59:03 AM	PHl3 MFC set to  0.000000
11/10/2010	11:59:03 AM	SiCl4 MFC set to  0.000000
11/10/2010	11:59:03 AM	Bypass solenoid MFC set to  0.000000
11/10/2010	11:59:03 AM	Tube furnace set to 0
11/10/2010	12:00:03 PM	H2 valve closed
11/10/2010	12:00:03 PM	BCl3 valve closed
11/10/2010	12:00:03 PM	PH3 valve closed
11/10/2010	12:00:03 PM	SiCl4 pre valve closed
11/10/2010	12:00:03 PM	SiCl4 post valve closed
11/10/2010	12:00:03 PM	Bubbler valve closed
11/10/2010	12:00:03 PM	Helium valve opened
11/10/2010	12:00:03 PM	Main Vac valve opened
11/10/2010	12:00:03 PM	Bypass valve opened
11/10/2010	12:00:03 PM	Helium MFC set to  100.000000
11/10/2010	12:00:03 PM	H2 MFC set to  0.000000
11/10/2010	12:00:03 PM	BCl3 MFC set to  0.000000
11/10/2010	12:00:03 PM	PHl3 MFC set to  0.000000
11/10/2010	12:00:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:00:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:00:03 PM	Tube furnace set to 0
11/10/2010	12:01:03 PM	Helium valve closed
11/10/2010	12:01:03 PM	H2 valve closed
11/10/2010	12:01:03 PM	BCl3 valve closed
11/10/2010	12:01:03 PM	PH3 valve closed
11/10/2010	12:01:03 PM	SiCl4 pre valve closed
11/10/2010	12:01:03 PM	SiCl4 post valve closed
11/10/2010	12:01:03 PM	Bubbler valve closed
11/10/2010	12:01:03 PM	Main Vac valve opened
11/10/2010	12:01:03 PM	Bypass valve opened
11/10/2010	12:01:03 PM	Helium MFC set to  0.000000
11/10/2010	12:01:03 PM	H2 MFC set to  0.000000
11/10/2010	12:01:03 PM	BCl3 MFC set to  0.000000
11/10/2010	12:01:03 PM	PHl3 MFC set to  0.000000
11/10/2010	12:01:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:01:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:01:03 PM	Tube furnace set to 0
11/10/2010	12:02:03 PM	H2 valve closed
11/10/2010	12:02:03 PM	BCl3 valve closed
11/10/2010	12:02:03 PM	PH3 valve closed
11/10/2010	12:02:03 PM	SiCl4 pre valve closed
11/10/2010	12:02:03 PM	SiCl4 post valve closed
11/10/2010	12:02:03 PM	Bubbler valve closed
11/10/2010	12:02:03 PM	Helium valve opened
11/10/2010	12:02:03 PM	Main Vac valve opened
11/10/2010	12:02:03 PM	Bypass valve opened
11/10/2010	12:02:03 PM	Helium MFC set to  100.000000
11/10/2010	12:02:03 PM	H2 MFC set to  0.000000
11/10/2010	12:02:03 PM	BCl3 MFC set to  0.000000
11/10/2010	12:02:03 PM	PHl3 MFC set to  0.000000
11/10/2010	12:02:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:02:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:02:04 PM	Tube furnace set to 0
11/10/2010	12:03:04 PM	Helium valve closed
11/10/2010	12:03:04 PM	H2 valve closed
11/10/2010	12:03:04 PM	BCl3 valve closed
11/10/2010	12:03:04 PM	PH3 valve closed
11/10/2010	12:03:04 PM	SiCl4 pre valve closed
11/10/2010	12:03:04 PM	SiCl4 post valve closed
11/10/2010	12:03:04 PM	Bubbler valve closed
11/10/2010	12:03:04 PM	Main Vac valve opened
11/10/2010	12:03:04 PM	Bypass valve opened
11/10/2010	12:03:04 PM	Helium MFC set to  0.000000
11/10/2010	12:03:04 PM	H2 MFC set to  0.000000
11/10/2010	12:03:04 PM	BCl3 MFC set to  0.000000
11/10/2010	12:03:04 PM	PHl3 MFC set to  0.000000
11/10/2010	12:03:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:03:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:03:04 PM	Tube furnace set to 0
11/10/2010	12:04:04 PM	H2 valve closed
11/10/2010	12:04:04 PM	BCl3 valve closed
11/10/2010	12:04:04 PM	PH3 valve closed
11/10/2010	12:04:04 PM	SiCl4 pre valve closed
11/10/2010	12:04:04 PM	SiCl4 post valve closed
11/10/2010	12:04:04 PM	Bubbler valve closed
11/10/2010	12:04:04 PM	Helium valve opened
11/10/2010	12:04:04 PM	Main Vac valve opened
11/10/2010	12:04:04 PM	Bypass valve opened
11/10/2010	12:04:04 PM	Helium MFC set to  100.000000
11/10/2010	12:04:04 PM	H2 MFC set to  0.000000
11/10/2010	12:04:04 PM	BCl3 MFC set to  0.000000
11/10/2010	12:04:04 PM	PHl3 MFC set to  0.000000
11/10/2010	12:04:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:04:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:04:04 PM	Tube furnace set to 0
11/10/2010	12:05:04 PM	Helium valve closed
11/10/2010	12:05:04 PM	H2 valve closed
11/10/2010	12:05:04 PM	BCl3 valve closed
11/10/2010	12:05:04 PM	PH3 valve closed
11/10/2010	12:05:04 PM	SiCl4 pre valve closed
11/10/2010	12:05:04 PM	SiCl4 post valve closed
11/10/2010	12:05:04 PM	Bubbler valve closed
11/10/2010	12:05:04 PM	Main Vac valve opened
11/10/2010	12:05:04 PM	Bypass valve opened
11/10/2010	12:05:04 PM	Helium MFC set to  0.000000
11/10/2010	12:05:04 PM	H2 MFC set to  0.000000
11/10/2010	12:05:04 PM	BCl3 MFC set to  0.000000
11/10/2010	12:05:04 PM	PHl3 MFC set to  0.000000
11/10/2010	12:05:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:05:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:05:04 PM	Tube furnace set to 0
11/10/2010	12:06:04 PM	H2 valve closed
11/10/2010	12:06:04 PM	BCl3 valve closed
11/10/2010	12:06:04 PM	PH3 valve closed
11/10/2010	12:06:04 PM	SiCl4 pre valve closed
11/10/2010	12:06:04 PM	SiCl4 post valve closed
11/10/2010	12:06:04 PM	Bubbler valve closed
11/10/2010	12:06:04 PM	Helium valve opened
11/10/2010	12:06:04 PM	Main Vac valve opened
11/10/2010	12:06:04 PM	Bypass valve opened
11/10/2010	12:06:04 PM	Helium MFC set to  100.000000
11/10/2010	12:06:04 PM	H2 MFC set to  0.000000
11/10/2010	12:06:04 PM	BCl3 MFC set to  0.000000
11/10/2010	12:06:04 PM	PHl3 MFC set to  0.000000
11/10/2010	12:06:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:06:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:06:04 PM	Tube furnace set to 0
11/10/2010	12:07:04 PM	Helium valve closed
11/10/2010	12:07:04 PM	H2 valve closed
11/10/2010	12:07:04 PM	BCl3 valve closed
11/10/2010	12:07:04 PM	PH3 valve closed
11/10/2010	12:07:04 PM	SiCl4 pre valve closed
11/10/2010	12:07:04 PM	SiCl4 post valve closed
11/10/2010	12:07:04 PM	Bubbler valve closed
11/10/2010	12:07:04 PM	Main Vac valve opened
11/10/2010	12:07:04 PM	Bypass valve opened
11/10/2010	12:07:04 PM	Helium MFC set to  0.000000
11/10/2010	12:07:04 PM	H2 MFC set to  0.000000
11/10/2010	12:07:04 PM	BCl3 MFC set to  0.000000
11/10/2010	12:07:04 PM	PHl3 MFC set to  0.000000
11/10/2010	12:07:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:07:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:07:05 PM	Tube furnace set to 0
11/10/2010	12:08:05 PM	H2 valve closed
11/10/2010	12:08:05 PM	BCl3 valve closed
11/10/2010	12:08:05 PM	PH3 valve closed
11/10/2010	12:08:05 PM	SiCl4 pre valve closed
11/10/2010	12:08:05 PM	SiCl4 post valve closed
11/10/2010	12:08:05 PM	Bubbler valve closed
11/10/2010	12:08:05 PM	Helium valve opened
11/10/2010	12:08:05 PM	Main Vac valve opened
11/10/2010	12:08:05 PM	Bypass valve opened
11/10/2010	12:08:05 PM	Helium MFC set to  100.000000
11/10/2010	12:08:05 PM	H2 MFC set to  0.000000
11/10/2010	12:08:05 PM	BCl3 MFC set to  0.000000
11/10/2010	12:08:05 PM	PHl3 MFC set to  0.000000
11/10/2010	12:08:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:08:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:08:05 PM	Tube furnace set to 0
11/10/2010	12:09:05 PM	Helium valve closed
11/10/2010	12:09:05 PM	H2 valve closed
11/10/2010	12:09:05 PM	BCl3 valve closed
11/10/2010	12:09:05 PM	PH3 valve closed
11/10/2010	12:09:05 PM	SiCl4 pre valve closed
11/10/2010	12:09:05 PM	SiCl4 post valve closed
11/10/2010	12:09:05 PM	Bubbler valve closed
11/10/2010	12:09:05 PM	Main Vac valve opened
11/10/2010	12:09:05 PM	Bypass valve opened
11/10/2010	12:09:05 PM	Helium MFC set to  0.000000
11/10/2010	12:09:05 PM	H2 MFC set to  0.000000
11/10/2010	12:09:05 PM	BCl3 MFC set to  0.000000
11/10/2010	12:09:05 PM	PHl3 MFC set to  0.000000
11/10/2010	12:09:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:09:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:09:05 PM	Tube furnace set to 0
11/10/2010	12:10:05 PM	H2 valve closed
11/10/2010	12:10:05 PM	BCl3 valve closed
11/10/2010	12:10:05 PM	PH3 valve closed
11/10/2010	12:10:05 PM	SiCl4 pre valve closed
11/10/2010	12:10:05 PM	SiCl4 post valve closed
11/10/2010	12:10:05 PM	Bubbler valve closed
11/10/2010	12:10:05 PM	Helium valve opened
11/10/2010	12:10:05 PM	Main Vac valve opened
11/10/2010	12:10:05 PM	Bypass valve opened
11/10/2010	12:10:05 PM	Helium MFC set to  100.000000
11/10/2010	12:10:05 PM	H2 MFC set to  0.000000
11/10/2010	12:10:05 PM	BCl3 MFC set to  0.000000
11/10/2010	12:10:05 PM	PHl3 MFC set to  0.000000
11/10/2010	12:10:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:10:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:10:05 PM	Tube furnace set to 0
11/10/2010	12:11:05 PM	Helium valve closed
11/10/2010	12:11:05 PM	H2 valve closed
11/10/2010	12:11:05 PM	BCl3 valve closed
11/10/2010	12:11:05 PM	PH3 valve closed
11/10/2010	12:11:05 PM	SiCl4 pre valve closed
11/10/2010	12:11:05 PM	SiCl4 post valve closed
11/10/2010	12:11:05 PM	Bubbler valve closed
11/10/2010	12:11:05 PM	Main Vac valve opened
11/10/2010	12:11:05 PM	Bypass valve opened
11/10/2010	12:11:05 PM	Helium MFC set to  0.000000
11/10/2010	12:11:05 PM	H2 MFC set to  0.000000
11/10/2010	12:11:05 PM	BCl3 MFC set to  0.000000
11/10/2010	12:11:05 PM	PHl3 MFC set to  0.000000
11/10/2010	12:11:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:11:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:11:05 PM	Tube furnace set to 0
11/10/2010	12:12:05 PM	H2 valve closed
11/10/2010	12:12:05 PM	BCl3 valve closed
11/10/2010	12:12:05 PM	PH3 valve closed
11/10/2010	12:12:05 PM	SiCl4 pre valve closed
11/10/2010	12:12:05 PM	SiCl4 post valve closed
11/10/2010	12:12:05 PM	Bubbler valve closed
11/10/2010	12:12:05 PM	Helium valve opened
11/10/2010	12:12:05 PM	Main Vac valve opened
11/10/2010	12:12:05 PM	Bypass valve opened
11/10/2010	12:12:05 PM	Helium MFC set to  100.000000
11/10/2010	12:12:05 PM	H2 MFC set to  0.000000
11/10/2010	12:12:05 PM	BCl3 MFC set to  0.000000
11/10/2010	12:12:05 PM	PHl3 MFC set to  0.000000
11/10/2010	12:12:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:12:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:12:06 PM	Tube furnace set to 0
11/10/2010	12:13:06 PM	Helium valve closed
11/10/2010	12:13:06 PM	H2 valve closed
11/10/2010	12:13:06 PM	BCl3 valve closed
11/10/2010	12:13:06 PM	PH3 valve closed
11/10/2010	12:13:06 PM	SiCl4 pre valve closed
11/10/2010	12:13:06 PM	SiCl4 post valve closed
11/10/2010	12:13:06 PM	Bubbler valve closed
11/10/2010	12:13:06 PM	Main Vac valve opened
11/10/2010	12:13:06 PM	Bypass valve opened
11/10/2010	12:13:06 PM	Helium MFC set to  0.000000
11/10/2010	12:13:06 PM	H2 MFC set to  0.000000
11/10/2010	12:13:06 PM	BCl3 MFC set to  0.000000
11/10/2010	12:13:06 PM	PHl3 MFC set to  0.000000
11/10/2010	12:13:06 PM	SiCl4 MFC set to  0.000000
11/10/2010	12:13:06 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	12:13:06 PM	Tube furnace set to 0
11/10/2010	12:13:07 PM	Run finished at 12:13 PM
11/10/2010	12:13:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	1:17:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	1:17:43 PM	Recipe started at 1:17 PM
11/10/2010	1:17:43 PM	Helium valve closed
11/10/2010	1:17:43 PM	H2 valve closed
11/10/2010	1:17:43 PM	BCl3 valve closed
11/10/2010	1:17:43 PM	PH3 valve closed
11/10/2010	1:17:43 PM	SiCl4 pre valve closed
11/10/2010	1:17:43 PM	SiCl4 post valve closed
11/10/2010	1:17:43 PM	Main Vac valve closed
11/10/2010	1:17:43 PM	Bubbler valve closed
11/10/2010	1:17:43 PM	Bypass valve opened
11/10/2010	1:17:43 PM	Helium MFC set to  0.000000
11/10/2010	1:17:43 PM	H2 MFC set to  0.000000
11/10/2010	1:17:43 PM	BCl3 MFC set to  0.000000
11/10/2010	1:17:43 PM	PHl3 MFC set to  0.000000
11/10/2010	1:17:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:17:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:17:43 PM	Tube furnace set to 0
11/10/2010	1:17:43 PM	Helium valve closed
11/10/2010	1:17:43 PM	H2 valve closed
11/10/2010	1:17:43 PM	BCl3 valve closed
11/10/2010	1:17:43 PM	PH3 valve closed
11/10/2010	1:17:43 PM	SiCl4 pre valve closed
11/10/2010	1:17:43 PM	SiCl4 post valve closed
11/10/2010	1:17:43 PM	Bubbler valve closed
11/10/2010	1:17:43 PM	Main Vac valve opened
11/10/2010	1:17:43 PM	Bypass valve opened
11/10/2010	1:17:43 PM	Helium MFC set to  0.000000
11/10/2010	1:17:43 PM	H2 MFC set to  0.000000
11/10/2010	1:17:43 PM	BCl3 MFC set to  0.000000
11/10/2010	1:17:43 PM	PHl3 MFC set to  0.000000
11/10/2010	1:17:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:17:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:17:44 PM	Tube furnace set to 0
11/10/2010	1:18:44 PM	H2 valve closed
11/10/2010	1:18:44 PM	BCl3 valve closed
11/10/2010	1:18:44 PM	PH3 valve closed
11/10/2010	1:18:44 PM	SiCl4 pre valve closed
11/10/2010	1:18:44 PM	SiCl4 post valve closed
11/10/2010	1:18:44 PM	Bubbler valve closed
11/10/2010	1:18:44 PM	Helium valve opened
11/10/2010	1:18:44 PM	Main Vac valve opened
11/10/2010	1:18:44 PM	Bypass valve opened
11/10/2010	1:18:44 PM	Helium MFC set to  100.000000
11/10/2010	1:18:44 PM	H2 MFC set to  0.000000
11/10/2010	1:18:44 PM	BCl3 MFC set to  0.000000
11/10/2010	1:18:44 PM	PHl3 MFC set to  0.000000
11/10/2010	1:18:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:18:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:18:44 PM	Tube furnace set to 0
11/10/2010	1:19:44 PM	Helium valve closed
11/10/2010	1:19:44 PM	H2 valve closed
11/10/2010	1:19:44 PM	BCl3 valve closed
11/10/2010	1:19:44 PM	PH3 valve closed
11/10/2010	1:19:44 PM	SiCl4 pre valve closed
11/10/2010	1:19:44 PM	SiCl4 post valve closed
11/10/2010	1:19:44 PM	Bubbler valve closed
11/10/2010	1:19:44 PM	Main Vac valve opened
11/10/2010	1:19:44 PM	Bypass valve opened
11/10/2010	1:19:44 PM	Helium MFC set to  0.000000
11/10/2010	1:19:44 PM	H2 MFC set to  0.000000
11/10/2010	1:19:44 PM	BCl3 MFC set to  0.000000
11/10/2010	1:19:44 PM	PHl3 MFC set to  0.000000
11/10/2010	1:19:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:19:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:19:44 PM	Tube furnace set to 0
11/10/2010	1:20:44 PM	H2 valve closed
11/10/2010	1:20:44 PM	BCl3 valve closed
11/10/2010	1:20:44 PM	PH3 valve closed
11/10/2010	1:20:44 PM	SiCl4 pre valve closed
11/10/2010	1:20:44 PM	SiCl4 post valve closed
11/10/2010	1:20:44 PM	Bubbler valve closed
11/10/2010	1:20:44 PM	Helium valve opened
11/10/2010	1:20:44 PM	Main Vac valve opened
11/10/2010	1:20:44 PM	Bypass valve opened
11/10/2010	1:20:44 PM	Helium MFC set to  100.000000
11/10/2010	1:20:44 PM	H2 MFC set to  0.000000
11/10/2010	1:20:44 PM	BCl3 MFC set to  0.000000
11/10/2010	1:20:44 PM	PHl3 MFC set to  0.000000
11/10/2010	1:20:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:20:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:20:44 PM	Tube furnace set to 0
11/10/2010	1:21:44 PM	Helium valve closed
11/10/2010	1:21:44 PM	H2 valve closed
11/10/2010	1:21:44 PM	BCl3 valve closed
11/10/2010	1:21:44 PM	PH3 valve closed
11/10/2010	1:21:44 PM	SiCl4 pre valve closed
11/10/2010	1:21:44 PM	SiCl4 post valve closed
11/10/2010	1:21:44 PM	Bubbler valve closed
11/10/2010	1:21:44 PM	Main Vac valve opened
11/10/2010	1:21:44 PM	Bypass valve opened
11/10/2010	1:21:44 PM	Helium MFC set to  0.000000
11/10/2010	1:21:44 PM	H2 MFC set to  0.000000
11/10/2010	1:21:44 PM	BCl3 MFC set to  0.000000
11/10/2010	1:21:44 PM	PHl3 MFC set to  0.000000
11/10/2010	1:21:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:21:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:21:44 PM	Tube furnace set to 0
11/10/2010	1:22:44 PM	H2 valve closed
11/10/2010	1:22:44 PM	BCl3 valve closed
11/10/2010	1:22:44 PM	PH3 valve closed
11/10/2010	1:22:44 PM	SiCl4 pre valve closed
11/10/2010	1:22:44 PM	SiCl4 post valve closed
11/10/2010	1:22:44 PM	Bubbler valve closed
11/10/2010	1:22:44 PM	Helium valve opened
11/10/2010	1:22:44 PM	Main Vac valve opened
11/10/2010	1:22:44 PM	Bypass valve opened
11/10/2010	1:22:44 PM	Helium MFC set to  100.000000
11/10/2010	1:22:44 PM	H2 MFC set to  0.000000
11/10/2010	1:22:44 PM	BCl3 MFC set to  0.000000
11/10/2010	1:22:44 PM	PHl3 MFC set to  0.000000
11/10/2010	1:22:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:22:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:22:45 PM	Tube furnace set to 0
11/10/2010	1:23:45 PM	Helium valve closed
11/10/2010	1:23:45 PM	H2 valve closed
11/10/2010	1:23:45 PM	BCl3 valve closed
11/10/2010	1:23:45 PM	PH3 valve closed
11/10/2010	1:23:45 PM	SiCl4 pre valve closed
11/10/2010	1:23:45 PM	SiCl4 post valve closed
11/10/2010	1:23:45 PM	Bubbler valve closed
11/10/2010	1:23:45 PM	Main Vac valve opened
11/10/2010	1:23:45 PM	Bypass valve opened
11/10/2010	1:23:45 PM	Helium MFC set to  0.000000
11/10/2010	1:23:45 PM	H2 MFC set to  0.000000
11/10/2010	1:23:45 PM	BCl3 MFC set to  0.000000
11/10/2010	1:23:45 PM	PHl3 MFC set to  0.000000
11/10/2010	1:23:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:23:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:23:45 PM	Tube furnace set to 0
11/10/2010	1:24:45 PM	H2 valve closed
11/10/2010	1:24:45 PM	BCl3 valve closed
11/10/2010	1:24:45 PM	PH3 valve closed
11/10/2010	1:24:45 PM	SiCl4 pre valve closed
11/10/2010	1:24:45 PM	SiCl4 post valve closed
11/10/2010	1:24:45 PM	Bubbler valve closed
11/10/2010	1:24:45 PM	Helium valve opened
11/10/2010	1:24:45 PM	Main Vac valve opened
11/10/2010	1:24:45 PM	Bypass valve opened
11/10/2010	1:24:45 PM	Helium MFC set to  100.000000
11/10/2010	1:24:45 PM	H2 MFC set to  0.000000
11/10/2010	1:24:45 PM	BCl3 MFC set to  0.000000
11/10/2010	1:24:45 PM	PHl3 MFC set to  0.000000
11/10/2010	1:24:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:24:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:24:45 PM	Tube furnace set to 0
11/10/2010	1:25:45 PM	Helium valve closed
11/10/2010	1:25:45 PM	H2 valve closed
11/10/2010	1:25:45 PM	BCl3 valve closed
11/10/2010	1:25:45 PM	PH3 valve closed
11/10/2010	1:25:45 PM	SiCl4 pre valve closed
11/10/2010	1:25:45 PM	SiCl4 post valve closed
11/10/2010	1:25:45 PM	Bubbler valve closed
11/10/2010	1:25:45 PM	Main Vac valve opened
11/10/2010	1:25:45 PM	Bypass valve opened
11/10/2010	1:25:45 PM	Helium MFC set to  0.000000
11/10/2010	1:25:45 PM	H2 MFC set to  0.000000
11/10/2010	1:25:45 PM	BCl3 MFC set to  0.000000
11/10/2010	1:25:45 PM	PHl3 MFC set to  0.000000
11/10/2010	1:25:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:25:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:25:45 PM	Tube furnace set to 0
11/10/2010	1:26:45 PM	H2 valve closed
11/10/2010	1:26:45 PM	BCl3 valve closed
11/10/2010	1:26:45 PM	PH3 valve closed
11/10/2010	1:26:45 PM	SiCl4 pre valve closed
11/10/2010	1:26:45 PM	SiCl4 post valve closed
11/10/2010	1:26:45 PM	Bubbler valve closed
11/10/2010	1:26:45 PM	Helium valve opened
11/10/2010	1:26:45 PM	Main Vac valve opened
11/10/2010	1:26:45 PM	Bypass valve opened
11/10/2010	1:26:45 PM	Helium MFC set to  100.000000
11/10/2010	1:26:45 PM	H2 MFC set to  0.000000
11/10/2010	1:26:45 PM	BCl3 MFC set to  0.000000
11/10/2010	1:26:45 PM	PHl3 MFC set to  0.000000
11/10/2010	1:26:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:26:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:26:45 PM	Tube furnace set to 0
11/10/2010	1:27:45 PM	Helium valve closed
11/10/2010	1:27:45 PM	H2 valve closed
11/10/2010	1:27:45 PM	BCl3 valve closed
11/10/2010	1:27:45 PM	PH3 valve closed
11/10/2010	1:27:45 PM	SiCl4 pre valve closed
11/10/2010	1:27:45 PM	SiCl4 post valve closed
11/10/2010	1:27:45 PM	Bubbler valve closed
11/10/2010	1:27:45 PM	Main Vac valve opened
11/10/2010	1:27:45 PM	Bypass valve opened
11/10/2010	1:27:45 PM	Helium MFC set to  0.000000
11/10/2010	1:27:45 PM	H2 MFC set to  0.000000
11/10/2010	1:27:45 PM	BCl3 MFC set to  0.000000
11/10/2010	1:27:45 PM	PHl3 MFC set to  0.000000
11/10/2010	1:27:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:27:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:27:46 PM	Tube furnace set to 0
11/10/2010	1:28:46 PM	H2 valve closed
11/10/2010	1:28:46 PM	BCl3 valve closed
11/10/2010	1:28:46 PM	PH3 valve closed
11/10/2010	1:28:46 PM	SiCl4 pre valve closed
11/10/2010	1:28:46 PM	SiCl4 post valve closed
11/10/2010	1:28:46 PM	Bubbler valve closed
11/10/2010	1:28:46 PM	Helium valve opened
11/10/2010	1:28:46 PM	Main Vac valve opened
11/10/2010	1:28:46 PM	Bypass valve opened
11/10/2010	1:28:46 PM	Helium MFC set to  100.000000
11/10/2010	1:28:46 PM	H2 MFC set to  0.000000
11/10/2010	1:28:46 PM	BCl3 MFC set to  0.000000
11/10/2010	1:28:46 PM	PHl3 MFC set to  0.000000
11/10/2010	1:28:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:28:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:28:46 PM	Tube furnace set to 0
11/10/2010	1:29:46 PM	Helium valve closed
11/10/2010	1:29:46 PM	H2 valve closed
11/10/2010	1:29:46 PM	BCl3 valve closed
11/10/2010	1:29:46 PM	PH3 valve closed
11/10/2010	1:29:46 PM	SiCl4 pre valve closed
11/10/2010	1:29:46 PM	SiCl4 post valve closed
11/10/2010	1:29:46 PM	Bubbler valve closed
11/10/2010	1:29:46 PM	Main Vac valve opened
11/10/2010	1:29:46 PM	Bypass valve opened
11/10/2010	1:29:46 PM	Helium MFC set to  0.000000
11/10/2010	1:29:46 PM	H2 MFC set to  0.000000
11/10/2010	1:29:46 PM	BCl3 MFC set to  0.000000
11/10/2010	1:29:46 PM	PHl3 MFC set to  0.000000
11/10/2010	1:29:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:29:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:29:46 PM	Tube furnace set to 0
11/10/2010	1:30:46 PM	H2 valve closed
11/10/2010	1:30:46 PM	BCl3 valve closed
11/10/2010	1:30:46 PM	PH3 valve closed
11/10/2010	1:30:46 PM	SiCl4 pre valve closed
11/10/2010	1:30:46 PM	SiCl4 post valve closed
11/10/2010	1:30:46 PM	Bubbler valve closed
11/10/2010	1:30:46 PM	Helium valve opened
11/10/2010	1:30:46 PM	Main Vac valve opened
11/10/2010	1:30:46 PM	Bypass valve opened
11/10/2010	1:30:46 PM	Helium MFC set to  100.000000
11/10/2010	1:30:46 PM	H2 MFC set to  0.000000
11/10/2010	1:30:46 PM	BCl3 MFC set to  0.000000
11/10/2010	1:30:46 PM	PHl3 MFC set to  0.000000
11/10/2010	1:30:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:30:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:30:46 PM	Tube furnace set to 0
11/10/2010	1:31:46 PM	Helium valve closed
11/10/2010	1:31:46 PM	H2 valve closed
11/10/2010	1:31:46 PM	BCl3 valve closed
11/10/2010	1:31:46 PM	PH3 valve closed
11/10/2010	1:31:46 PM	SiCl4 pre valve closed
11/10/2010	1:31:46 PM	SiCl4 post valve closed
11/10/2010	1:31:46 PM	Bubbler valve closed
11/10/2010	1:31:46 PM	Main Vac valve opened
11/10/2010	1:31:46 PM	Bypass valve opened
11/10/2010	1:31:46 PM	Helium MFC set to  0.000000
11/10/2010	1:31:46 PM	H2 MFC set to  0.000000
11/10/2010	1:31:46 PM	BCl3 MFC set to  0.000000
11/10/2010	1:31:46 PM	PHl3 MFC set to  0.000000
11/10/2010	1:31:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:31:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:31:46 PM	Tube furnace set to 0
11/10/2010	1:32:46 PM	H2 valve closed
11/10/2010	1:32:46 PM	BCl3 valve closed
11/10/2010	1:32:46 PM	PH3 valve closed
11/10/2010	1:32:46 PM	SiCl4 pre valve closed
11/10/2010	1:32:46 PM	SiCl4 post valve closed
11/10/2010	1:32:46 PM	Bubbler valve closed
11/10/2010	1:32:46 PM	Helium valve opened
11/10/2010	1:32:46 PM	Main Vac valve opened
11/10/2010	1:32:46 PM	Bypass valve opened
11/10/2010	1:32:46 PM	Helium MFC set to  100.000000
11/10/2010	1:32:46 PM	H2 MFC set to  0.000000
11/10/2010	1:32:46 PM	BCl3 MFC set to  0.000000
11/10/2010	1:32:46 PM	PHl3 MFC set to  0.000000
11/10/2010	1:32:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:32:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:32:46 PM	Tube furnace set to 0
11/10/2010	1:33:47 PM	Helium valve closed
11/10/2010	1:33:47 PM	H2 valve closed
11/10/2010	1:33:47 PM	BCl3 valve closed
11/10/2010	1:33:47 PM	PH3 valve closed
11/10/2010	1:33:47 PM	SiCl4 pre valve closed
11/10/2010	1:33:47 PM	SiCl4 post valve closed
11/10/2010	1:33:47 PM	Bubbler valve closed
11/10/2010	1:33:47 PM	Main Vac valve opened
11/10/2010	1:33:47 PM	Bypass valve opened
11/10/2010	1:33:47 PM	Helium MFC set to  0.000000
11/10/2010	1:33:47 PM	H2 MFC set to  0.000000
11/10/2010	1:33:47 PM	BCl3 MFC set to  0.000000
11/10/2010	1:33:47 PM	PHl3 MFC set to  0.000000
11/10/2010	1:33:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:33:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:33:47 PM	Tube furnace set to 0
11/10/2010	1:33:53 PM	Run aborted at 1:33 PM
11/10/2010	1:33:53 PM	Helium valve closed
11/10/2010	1:33:53 PM	H2 valve closed
11/10/2010	1:33:53 PM	BCl3 valve closed
11/10/2010	1:33:53 PM	PH3 valve closed
11/10/2010	1:33:53 PM	SiCl4 pre valve closed
11/10/2010	1:33:53 PM	SiCl4 post valve closed
11/10/2010	1:33:53 PM	Bypass valve closed
11/10/2010	1:33:53 PM	Main Vac valve closed
11/10/2010	1:33:53 PM	Bubbler valve closed
11/10/2010	1:33:53 PM	Helium MFC set to  0.000000
11/10/2010	1:33:53 PM	H2 MFC set to  0.000000
11/10/2010	1:33:53 PM	BCl3 MFC set to  0.000000
11/10/2010	1:33:53 PM	PHl3 MFC set to  0.000000
11/10/2010	1:33:53 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:33:53 PM	Tube furnace set to 0
11/10/2010	1:33:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	1:33:58 PM	Bypass valve opened
11/10/2010	1:33:59 PM	Main Vac valve opened
11/10/2010	1:35:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	1:36:01 PM	Recipe started at 1:35 PM
11/10/2010	1:36:01 PM	Helium valve closed
11/10/2010	1:36:01 PM	H2 valve closed
11/10/2010	1:36:01 PM	BCl3 valve closed
11/10/2010	1:36:01 PM	PH3 valve closed
11/10/2010	1:36:01 PM	SiCl4 pre valve closed
11/10/2010	1:36:01 PM	SiCl4 post valve closed
11/10/2010	1:36:01 PM	Main Vac valve closed
11/10/2010	1:36:01 PM	Bubbler valve closed
11/10/2010	1:36:01 PM	Bypass valve opened
11/10/2010	1:36:01 PM	Helium MFC set to  0.000000
11/10/2010	1:36:01 PM	H2 MFC set to  0.000000
11/10/2010	1:36:01 PM	BCl3 MFC set to  0.000000
11/10/2010	1:36:01 PM	PHl3 MFC set to  0.000000
11/10/2010	1:36:01 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:36:01 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:36:01 PM	Tube furnace set to 0
11/10/2010	1:36:01 PM	Helium valve closed
11/10/2010	1:36:01 PM	H2 valve closed
11/10/2010	1:36:01 PM	BCl3 valve closed
11/10/2010	1:36:01 PM	PH3 valve closed
11/10/2010	1:36:01 PM	SiCl4 pre valve closed
11/10/2010	1:36:01 PM	SiCl4 post valve closed
11/10/2010	1:36:01 PM	Bubbler valve closed
11/10/2010	1:36:01 PM	Main Vac valve opened
11/10/2010	1:36:01 PM	Bypass valve opened
11/10/2010	1:36:01 PM	Helium MFC set to  0.000000
11/10/2010	1:36:01 PM	H2 MFC set to  0.000000
11/10/2010	1:36:01 PM	BCl3 MFC set to  0.000000
11/10/2010	1:36:01 PM	PHl3 MFC set to  0.000000
11/10/2010	1:36:01 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:36:01 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:36:01 PM	Tube furnace set to 0
11/10/2010	1:37:01 PM	H2 valve closed
11/10/2010	1:37:01 PM	BCl3 valve closed
11/10/2010	1:37:01 PM	PH3 valve closed
11/10/2010	1:37:01 PM	SiCl4 pre valve closed
11/10/2010	1:37:01 PM	SiCl4 post valve closed
11/10/2010	1:37:01 PM	Bubbler valve closed
11/10/2010	1:37:01 PM	Helium valve opened
11/10/2010	1:37:01 PM	Main Vac valve opened
11/10/2010	1:37:01 PM	Bypass valve opened
11/10/2010	1:37:01 PM	Helium MFC set to  100.000000
11/10/2010	1:37:01 PM	H2 MFC set to  0.000000
11/10/2010	1:37:01 PM	BCl3 MFC set to  0.000000
11/10/2010	1:37:01 PM	PHl3 MFC set to  0.000000
11/10/2010	1:37:01 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:37:01 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:37:02 PM	Tube furnace set to 0
11/10/2010	1:38:02 PM	Helium valve closed
11/10/2010	1:38:02 PM	H2 valve closed
11/10/2010	1:38:02 PM	BCl3 valve closed
11/10/2010	1:38:02 PM	PH3 valve closed
11/10/2010	1:38:02 PM	SiCl4 pre valve closed
11/10/2010	1:38:02 PM	SiCl4 post valve closed
11/10/2010	1:38:02 PM	Bubbler valve closed
11/10/2010	1:38:02 PM	Main Vac valve opened
11/10/2010	1:38:02 PM	Bypass valve opened
11/10/2010	1:38:02 PM	Helium MFC set to  0.000000
11/10/2010	1:38:02 PM	H2 MFC set to  0.000000
11/10/2010	1:38:02 PM	BCl3 MFC set to  0.000000
11/10/2010	1:38:02 PM	PHl3 MFC set to  0.000000
11/10/2010	1:38:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:38:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:38:02 PM	Tube furnace set to 0
11/10/2010	1:39:02 PM	H2 valve closed
11/10/2010	1:39:02 PM	BCl3 valve closed
11/10/2010	1:39:02 PM	PH3 valve closed
11/10/2010	1:39:02 PM	SiCl4 pre valve closed
11/10/2010	1:39:02 PM	SiCl4 post valve closed
11/10/2010	1:39:02 PM	Bubbler valve closed
11/10/2010	1:39:02 PM	Helium valve opened
11/10/2010	1:39:02 PM	Main Vac valve opened
11/10/2010	1:39:02 PM	Bypass valve opened
11/10/2010	1:39:02 PM	Helium MFC set to  100.000000
11/10/2010	1:39:02 PM	H2 MFC set to  0.000000
11/10/2010	1:39:02 PM	BCl3 MFC set to  0.000000
11/10/2010	1:39:02 PM	PHl3 MFC set to  0.000000
11/10/2010	1:39:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:39:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:39:02 PM	Tube furnace set to 0
11/10/2010	1:40:02 PM	Helium valve closed
11/10/2010	1:40:02 PM	H2 valve closed
11/10/2010	1:40:02 PM	BCl3 valve closed
11/10/2010	1:40:02 PM	PH3 valve closed
11/10/2010	1:40:02 PM	SiCl4 pre valve closed
11/10/2010	1:40:02 PM	SiCl4 post valve closed
11/10/2010	1:40:02 PM	Bubbler valve closed
11/10/2010	1:40:02 PM	Main Vac valve opened
11/10/2010	1:40:02 PM	Bypass valve opened
11/10/2010	1:40:02 PM	Helium MFC set to  0.000000
11/10/2010	1:40:02 PM	H2 MFC set to  0.000000
11/10/2010	1:40:02 PM	BCl3 MFC set to  0.000000
11/10/2010	1:40:02 PM	PHl3 MFC set to  0.000000
11/10/2010	1:40:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:40:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:40:02 PM	Tube furnace set to 0
11/10/2010	1:41:02 PM	H2 valve closed
11/10/2010	1:41:02 PM	BCl3 valve closed
11/10/2010	1:41:02 PM	PH3 valve closed
11/10/2010	1:41:02 PM	SiCl4 pre valve closed
11/10/2010	1:41:02 PM	SiCl4 post valve closed
11/10/2010	1:41:02 PM	Bubbler valve closed
11/10/2010	1:41:02 PM	Helium valve opened
11/10/2010	1:41:02 PM	Main Vac valve opened
11/10/2010	1:41:02 PM	Bypass valve opened
11/10/2010	1:41:02 PM	Helium MFC set to  100.000000
11/10/2010	1:41:02 PM	H2 MFC set to  0.000000
11/10/2010	1:41:02 PM	BCl3 MFC set to  0.000000
11/10/2010	1:41:02 PM	PHl3 MFC set to  0.000000
11/10/2010	1:41:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:41:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:41:02 PM	Tube furnace set to 0
11/10/2010	1:42:02 PM	Helium valve closed
11/10/2010	1:42:02 PM	H2 valve closed
11/10/2010	1:42:02 PM	BCl3 valve closed
11/10/2010	1:42:02 PM	PH3 valve closed
11/10/2010	1:42:02 PM	SiCl4 pre valve closed
11/10/2010	1:42:02 PM	SiCl4 post valve closed
11/10/2010	1:42:02 PM	Bubbler valve closed
11/10/2010	1:42:02 PM	Main Vac valve opened
11/10/2010	1:42:02 PM	Bypass valve opened
11/10/2010	1:42:02 PM	Helium MFC set to  0.000000
11/10/2010	1:42:02 PM	H2 MFC set to  0.000000
11/10/2010	1:42:02 PM	BCl3 MFC set to  0.000000
11/10/2010	1:42:02 PM	PHl3 MFC set to  0.000000
11/10/2010	1:42:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:42:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:42:03 PM	Tube furnace set to 0
11/10/2010	1:43:03 PM	H2 valve closed
11/10/2010	1:43:03 PM	BCl3 valve closed
11/10/2010	1:43:03 PM	PH3 valve closed
11/10/2010	1:43:03 PM	SiCl4 pre valve closed
11/10/2010	1:43:03 PM	SiCl4 post valve closed
11/10/2010	1:43:03 PM	Bubbler valve closed
11/10/2010	1:43:03 PM	Helium valve opened
11/10/2010	1:43:03 PM	Main Vac valve opened
11/10/2010	1:43:03 PM	Bypass valve opened
11/10/2010	1:43:03 PM	Helium MFC set to  100.000000
11/10/2010	1:43:03 PM	H2 MFC set to  0.000000
11/10/2010	1:43:03 PM	BCl3 MFC set to  0.000000
11/10/2010	1:43:03 PM	PHl3 MFC set to  0.000000
11/10/2010	1:43:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:43:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:43:03 PM	Tube furnace set to 0
11/10/2010	1:44:03 PM	Helium valve closed
11/10/2010	1:44:03 PM	H2 valve closed
11/10/2010	1:44:03 PM	BCl3 valve closed
11/10/2010	1:44:03 PM	PH3 valve closed
11/10/2010	1:44:03 PM	SiCl4 pre valve closed
11/10/2010	1:44:03 PM	SiCl4 post valve closed
11/10/2010	1:44:03 PM	Bubbler valve closed
11/10/2010	1:44:03 PM	Main Vac valve opened
11/10/2010	1:44:03 PM	Bypass valve opened
11/10/2010	1:44:03 PM	Helium MFC set to  0.000000
11/10/2010	1:44:03 PM	H2 MFC set to  0.000000
11/10/2010	1:44:03 PM	BCl3 MFC set to  0.000000
11/10/2010	1:44:03 PM	PHl3 MFC set to  0.000000
11/10/2010	1:44:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:44:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:44:03 PM	Tube furnace set to 0
11/10/2010	1:45:03 PM	H2 valve closed
11/10/2010	1:45:03 PM	BCl3 valve closed
11/10/2010	1:45:03 PM	PH3 valve closed
11/10/2010	1:45:03 PM	SiCl4 pre valve closed
11/10/2010	1:45:03 PM	SiCl4 post valve closed
11/10/2010	1:45:03 PM	Bubbler valve closed
11/10/2010	1:45:03 PM	Helium valve opened
11/10/2010	1:45:03 PM	Main Vac valve opened
11/10/2010	1:45:03 PM	Bypass valve opened
11/10/2010	1:45:03 PM	Helium MFC set to  100.000000
11/10/2010	1:45:03 PM	H2 MFC set to  0.000000
11/10/2010	1:45:03 PM	BCl3 MFC set to  0.000000
11/10/2010	1:45:03 PM	PHl3 MFC set to  0.000000
11/10/2010	1:45:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:45:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:45:03 PM	Tube furnace set to 0
11/10/2010	1:46:03 PM	Helium valve closed
11/10/2010	1:46:03 PM	H2 valve closed
11/10/2010	1:46:03 PM	BCl3 valve closed
11/10/2010	1:46:03 PM	PH3 valve closed
11/10/2010	1:46:03 PM	SiCl4 pre valve closed
11/10/2010	1:46:03 PM	SiCl4 post valve closed
11/10/2010	1:46:03 PM	Bubbler valve closed
11/10/2010	1:46:03 PM	Main Vac valve opened
11/10/2010	1:46:03 PM	Bypass valve opened
11/10/2010	1:46:03 PM	Helium MFC set to  0.000000
11/10/2010	1:46:03 PM	H2 MFC set to  0.000000
11/10/2010	1:46:03 PM	BCl3 MFC set to  0.000000
11/10/2010	1:46:03 PM	PHl3 MFC set to  0.000000
11/10/2010	1:46:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:46:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:46:03 PM	Tube furnace set to 0
11/10/2010	1:47:03 PM	H2 valve closed
11/10/2010	1:47:03 PM	BCl3 valve closed
11/10/2010	1:47:03 PM	PH3 valve closed
11/10/2010	1:47:03 PM	SiCl4 pre valve closed
11/10/2010	1:47:03 PM	SiCl4 post valve closed
11/10/2010	1:47:03 PM	Bubbler valve closed
11/10/2010	1:47:03 PM	Helium valve opened
11/10/2010	1:47:03 PM	Main Vac valve opened
11/10/2010	1:47:03 PM	Bypass valve opened
11/10/2010	1:47:03 PM	Helium MFC set to  100.000000
11/10/2010	1:47:03 PM	H2 MFC set to  0.000000
11/10/2010	1:47:03 PM	BCl3 MFC set to  0.000000
11/10/2010	1:47:03 PM	PHl3 MFC set to  0.000000
11/10/2010	1:47:03 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:47:03 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:47:04 PM	Tube furnace set to 0
11/10/2010	1:48:04 PM	Helium valve closed
11/10/2010	1:48:04 PM	H2 valve closed
11/10/2010	1:48:04 PM	BCl3 valve closed
11/10/2010	1:48:04 PM	PH3 valve closed
11/10/2010	1:48:04 PM	SiCl4 pre valve closed
11/10/2010	1:48:04 PM	SiCl4 post valve closed
11/10/2010	1:48:04 PM	Bubbler valve closed
11/10/2010	1:48:04 PM	Main Vac valve opened
11/10/2010	1:48:04 PM	Bypass valve opened
11/10/2010	1:48:04 PM	Helium MFC set to  0.000000
11/10/2010	1:48:04 PM	H2 MFC set to  0.000000
11/10/2010	1:48:04 PM	BCl3 MFC set to  0.000000
11/10/2010	1:48:04 PM	PHl3 MFC set to  0.000000
11/10/2010	1:48:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:48:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:48:04 PM	Tube furnace set to 0
11/10/2010	1:49:04 PM	H2 valve closed
11/10/2010	1:49:04 PM	BCl3 valve closed
11/10/2010	1:49:04 PM	PH3 valve closed
11/10/2010	1:49:04 PM	SiCl4 pre valve closed
11/10/2010	1:49:04 PM	SiCl4 post valve closed
11/10/2010	1:49:04 PM	Bubbler valve closed
11/10/2010	1:49:04 PM	Helium valve opened
11/10/2010	1:49:04 PM	Main Vac valve opened
11/10/2010	1:49:04 PM	Bypass valve opened
11/10/2010	1:49:04 PM	Helium MFC set to  100.000000
11/10/2010	1:49:04 PM	H2 MFC set to  0.000000
11/10/2010	1:49:04 PM	BCl3 MFC set to  0.000000
11/10/2010	1:49:04 PM	PHl3 MFC set to  0.000000
11/10/2010	1:49:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:49:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:49:04 PM	Tube furnace set to 0
11/10/2010	1:50:04 PM	Helium valve closed
11/10/2010	1:50:04 PM	H2 valve closed
11/10/2010	1:50:04 PM	BCl3 valve closed
11/10/2010	1:50:04 PM	PH3 valve closed
11/10/2010	1:50:04 PM	SiCl4 pre valve closed
11/10/2010	1:50:04 PM	SiCl4 post valve closed
11/10/2010	1:50:04 PM	Bubbler valve closed
11/10/2010	1:50:04 PM	Main Vac valve opened
11/10/2010	1:50:04 PM	Bypass valve opened
11/10/2010	1:50:04 PM	Helium MFC set to  0.000000
11/10/2010	1:50:04 PM	H2 MFC set to  0.000000
11/10/2010	1:50:04 PM	BCl3 MFC set to  0.000000
11/10/2010	1:50:04 PM	PHl3 MFC set to  0.000000
11/10/2010	1:50:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:50:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:50:04 PM	Tube furnace set to 0
11/10/2010	1:51:04 PM	H2 valve closed
11/10/2010	1:51:04 PM	BCl3 valve closed
11/10/2010	1:51:04 PM	PH3 valve closed
11/10/2010	1:51:04 PM	SiCl4 pre valve closed
11/10/2010	1:51:04 PM	SiCl4 post valve closed
11/10/2010	1:51:04 PM	Bubbler valve closed
11/10/2010	1:51:04 PM	Helium valve opened
11/10/2010	1:51:04 PM	Main Vac valve opened
11/10/2010	1:51:04 PM	Bypass valve opened
11/10/2010	1:51:04 PM	Helium MFC set to  100.000000
11/10/2010	1:51:04 PM	H2 MFC set to  0.000000
11/10/2010	1:51:04 PM	BCl3 MFC set to  0.000000
11/10/2010	1:51:04 PM	PHl3 MFC set to  0.000000
11/10/2010	1:51:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:51:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:51:04 PM	Tube furnace set to 0
11/10/2010	1:52:04 PM	Helium valve closed
11/10/2010	1:52:04 PM	H2 valve closed
11/10/2010	1:52:04 PM	BCl3 valve closed
11/10/2010	1:52:04 PM	PH3 valve closed
11/10/2010	1:52:04 PM	SiCl4 pre valve closed
11/10/2010	1:52:04 PM	SiCl4 post valve closed
11/10/2010	1:52:04 PM	Bubbler valve closed
11/10/2010	1:52:04 PM	Main Vac valve opened
11/10/2010	1:52:04 PM	Bypass valve opened
11/10/2010	1:52:04 PM	Helium MFC set to  0.000000
11/10/2010	1:52:04 PM	H2 MFC set to  0.000000
11/10/2010	1:52:04 PM	BCl3 MFC set to  0.000000
11/10/2010	1:52:04 PM	PHl3 MFC set to  0.000000
11/10/2010	1:52:04 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:52:04 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:52:05 PM	Tube furnace set to 0
11/10/2010	1:53:05 PM	H2 valve closed
11/10/2010	1:53:05 PM	BCl3 valve closed
11/10/2010	1:53:05 PM	PH3 valve closed
11/10/2010	1:53:05 PM	SiCl4 pre valve closed
11/10/2010	1:53:05 PM	SiCl4 post valve closed
11/10/2010	1:53:05 PM	Bubbler valve closed
11/10/2010	1:53:05 PM	Helium valve opened
11/10/2010	1:53:05 PM	Main Vac valve opened
11/10/2010	1:53:05 PM	Bypass valve opened
11/10/2010	1:53:05 PM	Helium MFC set to  100.000000
11/10/2010	1:53:05 PM	H2 MFC set to  0.000000
11/10/2010	1:53:05 PM	BCl3 MFC set to  0.000000
11/10/2010	1:53:05 PM	PHl3 MFC set to  0.000000
11/10/2010	1:53:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:53:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:53:05 PM	Tube furnace set to 0
11/10/2010	1:54:05 PM	Helium valve closed
11/10/2010	1:54:05 PM	H2 valve closed
11/10/2010	1:54:05 PM	BCl3 valve closed
11/10/2010	1:54:05 PM	PH3 valve closed
11/10/2010	1:54:05 PM	SiCl4 pre valve closed
11/10/2010	1:54:05 PM	SiCl4 post valve closed
11/10/2010	1:54:05 PM	Bubbler valve closed
11/10/2010	1:54:05 PM	Main Vac valve opened
11/10/2010	1:54:05 PM	Bypass valve opened
11/10/2010	1:54:05 PM	Helium MFC set to  0.000000
11/10/2010	1:54:05 PM	H2 MFC set to  0.000000
11/10/2010	1:54:05 PM	BCl3 MFC set to  0.000000
11/10/2010	1:54:05 PM	PHl3 MFC set to  0.000000
11/10/2010	1:54:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:54:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:54:05 PM	Tube furnace set to 0
11/10/2010	1:55:05 PM	H2 valve closed
11/10/2010	1:55:05 PM	BCl3 valve closed
11/10/2010	1:55:05 PM	PH3 valve closed
11/10/2010	1:55:05 PM	SiCl4 pre valve closed
11/10/2010	1:55:05 PM	SiCl4 post valve closed
11/10/2010	1:55:05 PM	Bubbler valve closed
11/10/2010	1:55:05 PM	Helium valve opened
11/10/2010	1:55:05 PM	Main Vac valve opened
11/10/2010	1:55:05 PM	Bypass valve opened
11/10/2010	1:55:05 PM	Helium MFC set to  100.000000
11/10/2010	1:55:05 PM	H2 MFC set to  0.000000
11/10/2010	1:55:05 PM	BCl3 MFC set to  0.000000
11/10/2010	1:55:05 PM	PHl3 MFC set to  0.000000
11/10/2010	1:55:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:55:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:55:05 PM	Tube furnace set to 0
11/10/2010	1:56:05 PM	Helium valve closed
11/10/2010	1:56:05 PM	H2 valve closed
11/10/2010	1:56:05 PM	BCl3 valve closed
11/10/2010	1:56:05 PM	PH3 valve closed
11/10/2010	1:56:05 PM	SiCl4 pre valve closed
11/10/2010	1:56:05 PM	SiCl4 post valve closed
11/10/2010	1:56:05 PM	Bubbler valve closed
11/10/2010	1:56:05 PM	Main Vac valve opened
11/10/2010	1:56:05 PM	Bypass valve opened
11/10/2010	1:56:05 PM	Helium MFC set to  0.000000
11/10/2010	1:56:05 PM	H2 MFC set to  0.000000
11/10/2010	1:56:05 PM	BCl3 MFC set to  0.000000
11/10/2010	1:56:05 PM	PHl3 MFC set to  0.000000
11/10/2010	1:56:05 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:56:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:56:05 PM	Tube furnace set to 0
11/10/2010	1:56:06 PM	Run finished at 1:56 PM
11/10/2010	1:56:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	1:56:58 PM	Bypass valve closed
11/10/2010	1:56:59 PM	Main Vac valve closed
11/10/2010	1:57:23 PM	Bypass valve opened
11/10/2010	1:57:24 PM	Main Vac valve opened
11/10/2010	1:58:52 PM	Recipe started at 1:58 PM
11/10/2010	1:58:52 PM	Helium valve closed
11/10/2010	1:58:52 PM	BCl3 valve closed
11/10/2010	1:58:52 PM	PH3 valve closed
11/10/2010	1:58:52 PM	SiCl4 pre valve closed
11/10/2010	1:58:52 PM	SiCl4 post valve closed
11/10/2010	1:58:52 PM	Main Vac valve closed
11/10/2010	1:58:52 PM	Bypass valve closed
11/10/2010	1:58:52 PM	Bubbler valve closed
11/10/2010	1:58:52 PM	H2 valve opened
11/10/2010	1:58:52 PM	Helium MFC set to  0.000000
11/10/2010	1:58:52 PM	H2 MFC set to  500.000000
11/10/2010	1:58:52 PM	BCl3 MFC set to  0.000000
11/10/2010	1:58:52 PM	PHl3 MFC set to  0.000000
11/10/2010	1:58:52 PM	SiCl4 MFC set to  0.000000
11/10/2010	1:58:52 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	1:58:52 PM	Tube furnace set to 0
11/10/2010	2:00:15 PM	Helium valve closed
11/10/2010	2:00:15 PM	BCl3 valve closed
11/10/2010	2:00:15 PM	PH3 valve closed
11/10/2010	2:00:15 PM	SiCl4 pre valve closed
11/10/2010	2:00:15 PM	SiCl4 post valve closed
11/10/2010	2:00:15 PM	Main Vac valve closed
11/10/2010	2:00:15 PM	Bypass valve closed
11/10/2010	2:00:15 PM	H2 valve opened
11/10/2010	2:00:15 PM	Bubbler valve opened
11/10/2010	2:00:15 PM	Helium MFC set to  0.000000
11/10/2010	2:00:15 PM	H2 MFC set to  500.000000
11/10/2010	2:00:15 PM	BCl3 MFC set to  0.000000
11/10/2010	2:00:15 PM	PHl3 MFC set to  0.000000
11/10/2010	2:00:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:00:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:00:15 PM	Tube furnace set to 1000
11/10/2010	2:00:15 PM	Helium valve closed
11/10/2010	2:00:15 PM	H2 valve closed
11/10/2010	2:00:15 PM	BCl3 valve closed
11/10/2010	2:00:15 PM	PH3 valve closed
11/10/2010	2:00:15 PM	SiCl4 pre valve closed
11/10/2010	2:00:15 PM	SiCl4 post valve closed
11/10/2010	2:00:15 PM	Main Vac valve closed
11/10/2010	2:00:15 PM	Bubbler valve closed
11/10/2010	2:00:15 PM	Bypass valve closed
11/10/2010	2:00:15 PM	Helium MFC set to  0.000000
11/10/2010	2:00:15 PM	H2 MFC set to  0.000000
11/10/2010	2:00:15 PM	BCl3 MFC set to  0.000000
11/10/2010	2:00:15 PM	PHl3 MFC set to  0.000000
11/10/2010	2:00:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:00:15 PM	Bypass solenoid MFC set to  760.000000
11/10/2010	2:00:15 PM	Tube furnace set to 0
11/10/2010	2:00:15 PM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
11/10/2010	2:20:40 PM	Run aborted at 2:20 PM
11/10/2010	2:22:59 PM	Bubbler valve closed
11/10/2010	2:23:00 PM	H2 valve closed
11/10/2010	2:23:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	2:23:06 PM	Recipe started at 2:23 PM
11/10/2010	2:23:06 PM	Helium valve closed
11/10/2010	2:23:06 PM	H2 valve closed
11/10/2010	2:23:06 PM	BCl3 valve closed
11/10/2010	2:23:06 PM	PH3 valve closed
11/10/2010	2:23:06 PM	SiCl4 pre valve closed
11/10/2010	2:23:06 PM	SiCl4 post valve closed
11/10/2010	2:23:06 PM	Main Vac valve closed
11/10/2010	2:23:06 PM	Bubbler valve closed
11/10/2010	2:23:06 PM	Bypass valve opened
11/10/2010	2:23:06 PM	Helium MFC set to  0.000000
11/10/2010	2:23:06 PM	H2 MFC set to  0.000000
11/10/2010	2:23:06 PM	BCl3 MFC set to  0.000000
11/10/2010	2:23:06 PM	PHl3 MFC set to  0.000000
11/10/2010	2:23:06 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:23:06 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:23:06 PM	Tube furnace set to 0
11/10/2010	2:23:28 PM	Helium valve closed
11/10/2010	2:23:28 PM	H2 valve closed
11/10/2010	2:23:28 PM	BCl3 valve closed
11/10/2010	2:23:28 PM	PH3 valve closed
11/10/2010	2:23:28 PM	SiCl4 pre valve closed
11/10/2010	2:23:28 PM	SiCl4 post valve closed
11/10/2010	2:23:28 PM	Bubbler valve closed
11/10/2010	2:23:28 PM	Main Vac valve opened
11/10/2010	2:23:28 PM	Bypass valve opened
11/10/2010	2:23:28 PM	Helium MFC set to  0.000000
11/10/2010	2:23:28 PM	H2 MFC set to  0.000000
11/10/2010	2:23:28 PM	BCl3 MFC set to  0.000000
11/10/2010	2:23:28 PM	PHl3 MFC set to  0.000000
11/10/2010	2:23:28 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:23:28 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:23:28 PM	Tube furnace set to 0
11/10/2010	2:23:29 PM	Run finished at 2:23 PM
11/10/2010	2:23:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	2:25:48 PM	Recipe started at 2:25 PM
11/10/2010	2:25:48 PM	Helium valve closed
11/10/2010	2:25:48 PM	BCl3 valve closed
11/10/2010	2:25:48 PM	PH3 valve closed
11/10/2010	2:25:48 PM	SiCl4 pre valve closed
11/10/2010	2:25:48 PM	SiCl4 post valve closed
11/10/2010	2:25:48 PM	Main Vac valve closed
11/10/2010	2:25:48 PM	Bypass valve closed
11/10/2010	2:25:48 PM	Bubbler valve closed
11/10/2010	2:25:48 PM	H2 valve opened
11/10/2010	2:25:48 PM	Helium MFC set to  0.000000
11/10/2010	2:25:48 PM	H2 MFC set to  500.000000
11/10/2010	2:25:48 PM	BCl3 MFC set to  0.000000
11/10/2010	2:25:48 PM	PHl3 MFC set to  0.000000
11/10/2010	2:25:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:25:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:25:48 PM	Tube furnace set to 0
11/10/2010	2:27:11 PM	Helium valve closed
11/10/2010	2:27:11 PM	BCl3 valve closed
11/10/2010	2:27:11 PM	PH3 valve closed
11/10/2010	2:27:11 PM	SiCl4 pre valve closed
11/10/2010	2:27:11 PM	SiCl4 post valve closed
11/10/2010	2:27:11 PM	Main Vac valve closed
11/10/2010	2:27:11 PM	Bypass valve closed
11/10/2010	2:27:11 PM	H2 valve opened
11/10/2010	2:27:11 PM	Bubbler valve opened
11/10/2010	2:27:11 PM	Helium MFC set to  0.000000
11/10/2010	2:27:11 PM	H2 MFC set to  500.000000
11/10/2010	2:27:11 PM	BCl3 MFC set to  0.000000
11/10/2010	2:27:11 PM	PHl3 MFC set to  0.000000
11/10/2010	2:27:11 PM	SiCl4 MFC set to  0.000000
11/10/2010	2:27:11 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:27:12 PM	Tube furnace set to 1000
11/10/2010	2:47:12 PM	Helium valve closed
11/10/2010	2:47:12 PM	BCl3 valve closed
11/10/2010	2:47:12 PM	Main Vac valve closed
11/10/2010	2:47:12 PM	Bypass valve closed
11/10/2010	2:47:12 PM	H2 valve opened
11/10/2010	2:47:12 PM	PH3 valve opened
11/10/2010	2:47:12 PM	SiCl4 pre valve opened
11/10/2010	2:47:12 PM	SiCl4 post valve opened
11/10/2010	2:47:12 PM	Bubbler valve opened
11/10/2010	2:47:12 PM	Helium MFC set to  0.000000
11/10/2010	2:47:12 PM	H2 MFC set to  500.000000
11/10/2010	2:47:12 PM	BCl3 MFC set to  0.000000
11/10/2010	2:47:12 PM	PHl3 MFC set to  1.000000
11/10/2010	2:47:12 PM	SiCl4 MFC set to  50.000000
11/10/2010	2:47:12 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	2:47:12 PM	Tube furnace set to 1000
11/10/2010	3:17:12 PM	H2 valve closed
11/10/2010	3:17:12 PM	BCl3 valve closed
11/10/2010	3:17:12 PM	PH3 valve closed
11/10/2010	3:17:12 PM	SiCl4 pre valve closed
11/10/2010	3:17:12 PM	SiCl4 post valve closed
11/10/2010	3:17:12 PM	Main Vac valve closed
11/10/2010	3:17:12 PM	Bypass valve closed
11/10/2010	3:17:12 PM	Helium valve opened
11/10/2010	3:17:12 PM	Bubbler valve opened
11/10/2010	3:17:12 PM	Helium MFC set to  500.000000
11/10/2010	3:17:12 PM	H2 MFC set to  0.000000
11/10/2010	3:17:12 PM	BCl3 MFC set to  0.000000
11/10/2010	3:17:12 PM	PHl3 MFC set to  0.000000
11/10/2010	3:17:12 PM	SiCl4 MFC set to  0.000000
11/10/2010	3:17:12 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	3:17:12 PM	Tube furnace set to 0
11/10/2010	3:37:12 PM	Helium valve closed
11/10/2010	3:37:12 PM	H2 valve closed
11/10/2010	3:37:12 PM	BCl3 valve closed
11/10/2010	3:37:12 PM	PH3 valve closed
11/10/2010	3:37:12 PM	SiCl4 pre valve closed
11/10/2010	3:37:12 PM	SiCl4 post valve closed
11/10/2010	3:37:12 PM	Main Vac valve closed
11/10/2010	3:37:12 PM	Bypass valve closed
11/10/2010	3:37:12 PM	Bubbler valve closed
11/10/2010	3:37:12 PM	Helium MFC set to  0.000000
11/10/2010	3:37:12 PM	H2 MFC set to  0.000000
11/10/2010	3:37:12 PM	BCl3 MFC set to  0.000000
11/10/2010	3:37:12 PM	PHl3 MFC set to  0.000000
11/10/2010	3:37:12 PM	SiCl4 MFC set to  0.000000
11/10/2010	3:37:12 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	3:37:12 PM	Tube furnace set to 0
11/10/2010	3:37:12 PM	Run finished at 3:37 PM
11/10/2010	5:21:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	5:21:02 PM	Recipe started at 5:21 PM
11/10/2010	5:21:02 PM	H2 valve closed
11/10/2010	5:21:02 PM	BCl3 valve closed
11/10/2010	5:21:02 PM	PH3 valve closed
11/10/2010	5:21:02 PM	SiCl4 pre valve closed
11/10/2010	5:21:02 PM	SiCl4 post valve closed
11/10/2010	5:21:02 PM	Main Vac valve closed
11/10/2010	5:21:02 PM	Bypass valve closed
11/10/2010	5:21:02 PM	Bubbler valve closed
11/10/2010	5:21:02 PM	Helium valve opened
11/10/2010	5:21:02 PM	Helium MFC set to  500.000000
11/10/2010	5:21:02 PM	H2 MFC set to  0.000000
11/10/2010	5:21:02 PM	BCl3 MFC set to  0.000000
11/10/2010	5:21:02 PM	PHl3 MFC set to  0.000000
11/10/2010	5:21:02 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:21:02 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:21:02 PM	Tube furnace set to 0
11/10/2010	5:21:12 PM	Helium valve closed
11/10/2010	5:21:12 PM	H2 valve closed
11/10/2010	5:21:12 PM	BCl3 valve closed
11/10/2010	5:21:12 PM	PH3 valve closed
11/10/2010	5:21:12 PM	SiCl4 pre valve closed
11/10/2010	5:21:12 PM	SiCl4 post valve closed
11/10/2010	5:21:12 PM	Main Vac valve closed
11/10/2010	5:21:12 PM	Bypass valve closed
11/10/2010	5:21:12 PM	Bubbler valve closed
11/10/2010	5:21:12 PM	Helium MFC set to  0.000000
11/10/2010	5:21:12 PM	H2 MFC set to  0.000000
11/10/2010	5:21:12 PM	BCl3 MFC set to  0.000000
11/10/2010	5:21:12 PM	PHl3 MFC set to  0.000000
11/10/2010	5:21:12 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:21:12 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:21:12 PM	Tube furnace set to 0
11/10/2010	5:21:12 PM	Run finished at 5:21 PM
11/10/2010	5:21:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	5:24:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	5:24:38 PM	Recipe started at 5:24 PM
11/10/2010	5:24:38 PM	Helium valve closed
11/10/2010	5:24:38 PM	H2 valve closed
11/10/2010	5:24:38 PM	BCl3 valve closed
11/10/2010	5:24:38 PM	PH3 valve closed
11/10/2010	5:24:38 PM	SiCl4 pre valve closed
11/10/2010	5:24:38 PM	SiCl4 post valve closed
11/10/2010	5:24:38 PM	Main Vac valve closed
11/10/2010	5:24:38 PM	Bubbler valve closed
11/10/2010	5:24:38 PM	Bypass valve opened
11/10/2010	5:24:38 PM	Helium MFC set to  0.000000
11/10/2010	5:24:38 PM	H2 MFC set to  0.000000
11/10/2010	5:24:38 PM	BCl3 MFC set to  0.000000
11/10/2010	5:24:38 PM	PHl3 MFC set to  0.000000
11/10/2010	5:24:38 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:24:38 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:24:39 PM	Tube furnace set to 0
11/10/2010	5:25:34 PM	Helium valve closed
11/10/2010	5:25:34 PM	H2 valve closed
11/10/2010	5:25:34 PM	BCl3 valve closed
11/10/2010	5:25:34 PM	PH3 valve closed
11/10/2010	5:25:34 PM	SiCl4 pre valve closed
11/10/2010	5:25:34 PM	SiCl4 post valve closed
11/10/2010	5:25:34 PM	Bubbler valve closed
11/10/2010	5:25:34 PM	Main Vac valve opened
11/10/2010	5:25:34 PM	Bypass valve opened
11/10/2010	5:25:34 PM	Helium MFC set to  0.000000
11/10/2010	5:25:34 PM	H2 MFC set to  0.000000
11/10/2010	5:25:34 PM	BCl3 MFC set to  0.000000
11/10/2010	5:25:34 PM	PHl3 MFC set to  0.000000
11/10/2010	5:25:34 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:25:34 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:25:34 PM	Tube furnace set to 0
11/10/2010	5:25:34 PM	Run finished at 5:25 PM
11/10/2010	5:25:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	5:27:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	5:27:40 PM	Recipe started at 5:27 PM
11/10/2010	5:27:40 PM	Helium valve closed
11/10/2010	5:27:40 PM	H2 valve closed
11/10/2010	5:27:40 PM	BCl3 valve closed
11/10/2010	5:27:40 PM	PH3 valve closed
11/10/2010	5:27:40 PM	SiCl4 pre valve closed
11/10/2010	5:27:40 PM	SiCl4 post valve closed
11/10/2010	5:27:40 PM	Main Vac valve closed
11/10/2010	5:27:40 PM	Bubbler valve closed
11/10/2010	5:27:40 PM	Bypass valve opened
11/10/2010	5:27:40 PM	Helium MFC set to  0.000000
11/10/2010	5:27:40 PM	H2 MFC set to  0.000000
11/10/2010	5:27:40 PM	BCl3 MFC set to  0.000000
11/10/2010	5:27:40 PM	PHl3 MFC set to  0.000000
11/10/2010	5:27:40 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:27:40 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:27:40 PM	Tube furnace set to 0
11/10/2010	5:27:41 PM	Helium valve closed
11/10/2010	5:27:41 PM	H2 valve closed
11/10/2010	5:27:41 PM	BCl3 valve closed
11/10/2010	5:27:41 PM	PH3 valve closed
11/10/2010	5:27:41 PM	SiCl4 pre valve closed
11/10/2010	5:27:41 PM	SiCl4 post valve closed
11/10/2010	5:27:41 PM	Bubbler valve closed
11/10/2010	5:27:41 PM	Main Vac valve opened
11/10/2010	5:27:41 PM	Bypass valve opened
11/10/2010	5:27:41 PM	Helium MFC set to  0.000000
11/10/2010	5:27:41 PM	H2 MFC set to  0.000000
11/10/2010	5:27:41 PM	BCl3 MFC set to  0.000000
11/10/2010	5:27:41 PM	PHl3 MFC set to  0.000000
11/10/2010	5:27:41 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:27:41 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:27:41 PM	Tube furnace set to 0
11/10/2010	5:28:41 PM	H2 valve closed
11/10/2010	5:28:41 PM	BCl3 valve closed
11/10/2010	5:28:41 PM	PH3 valve closed
11/10/2010	5:28:41 PM	SiCl4 pre valve closed
11/10/2010	5:28:41 PM	SiCl4 post valve closed
11/10/2010	5:28:41 PM	Bubbler valve closed
11/10/2010	5:28:41 PM	Helium valve opened
11/10/2010	5:28:41 PM	Main Vac valve opened
11/10/2010	5:28:41 PM	Bypass valve opened
11/10/2010	5:28:41 PM	Helium MFC set to  100.000000
11/10/2010	5:28:41 PM	H2 MFC set to  0.000000
11/10/2010	5:28:41 PM	BCl3 MFC set to  0.000000
11/10/2010	5:28:41 PM	PHl3 MFC set to  0.000000
11/10/2010	5:28:41 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:28:41 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:28:41 PM	Tube furnace set to 0
11/10/2010	5:29:41 PM	Helium valve closed
11/10/2010	5:29:41 PM	H2 valve closed
11/10/2010	5:29:41 PM	BCl3 valve closed
11/10/2010	5:29:41 PM	PH3 valve closed
11/10/2010	5:29:41 PM	SiCl4 pre valve closed
11/10/2010	5:29:41 PM	SiCl4 post valve closed
11/10/2010	5:29:41 PM	Bubbler valve closed
11/10/2010	5:29:41 PM	Main Vac valve opened
11/10/2010	5:29:41 PM	Bypass valve opened
11/10/2010	5:29:41 PM	Helium MFC set to  0.000000
11/10/2010	5:29:41 PM	H2 MFC set to  0.000000
11/10/2010	5:29:41 PM	BCl3 MFC set to  0.000000
11/10/2010	5:29:41 PM	PHl3 MFC set to  0.000000
11/10/2010	5:29:41 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:29:41 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:29:41 PM	Tube furnace set to 0
11/10/2010	5:30:41 PM	H2 valve closed
11/10/2010	5:30:41 PM	BCl3 valve closed
11/10/2010	5:30:41 PM	PH3 valve closed
11/10/2010	5:30:41 PM	SiCl4 pre valve closed
11/10/2010	5:30:41 PM	SiCl4 post valve closed
11/10/2010	5:30:41 PM	Bubbler valve closed
11/10/2010	5:30:41 PM	Helium valve opened
11/10/2010	5:30:41 PM	Main Vac valve opened
11/10/2010	5:30:41 PM	Bypass valve opened
11/10/2010	5:30:41 PM	Helium MFC set to  100.000000
11/10/2010	5:30:41 PM	H2 MFC set to  0.000000
11/10/2010	5:30:41 PM	BCl3 MFC set to  0.000000
11/10/2010	5:30:41 PM	PHl3 MFC set to  0.000000
11/10/2010	5:30:41 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:30:41 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:30:41 PM	Tube furnace set to 0
11/10/2010	5:31:41 PM	Helium valve closed
11/10/2010	5:31:41 PM	H2 valve closed
11/10/2010	5:31:41 PM	BCl3 valve closed
11/10/2010	5:31:41 PM	PH3 valve closed
11/10/2010	5:31:41 PM	SiCl4 pre valve closed
11/10/2010	5:31:41 PM	SiCl4 post valve closed
11/10/2010	5:31:41 PM	Bubbler valve closed
11/10/2010	5:31:41 PM	Main Vac valve opened
11/10/2010	5:31:41 PM	Bypass valve opened
11/10/2010	5:31:41 PM	Helium MFC set to  0.000000
11/10/2010	5:31:41 PM	H2 MFC set to  0.000000
11/10/2010	5:31:41 PM	BCl3 MFC set to  0.000000
11/10/2010	5:31:41 PM	PHl3 MFC set to  0.000000
11/10/2010	5:31:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:31:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:31:42 PM	Tube furnace set to 0
11/10/2010	5:32:42 PM	H2 valve closed
11/10/2010	5:32:42 PM	BCl3 valve closed
11/10/2010	5:32:42 PM	PH3 valve closed
11/10/2010	5:32:42 PM	SiCl4 pre valve closed
11/10/2010	5:32:42 PM	SiCl4 post valve closed
11/10/2010	5:32:42 PM	Bubbler valve closed
11/10/2010	5:32:42 PM	Helium valve opened
11/10/2010	5:32:42 PM	Main Vac valve opened
11/10/2010	5:32:42 PM	Bypass valve opened
11/10/2010	5:32:42 PM	Helium MFC set to  100.000000
11/10/2010	5:32:42 PM	H2 MFC set to  0.000000
11/10/2010	5:32:42 PM	BCl3 MFC set to  0.000000
11/10/2010	5:32:42 PM	PHl3 MFC set to  0.000000
11/10/2010	5:32:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:32:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:32:42 PM	Tube furnace set to 0
11/10/2010	5:33:42 PM	Helium valve closed
11/10/2010	5:33:42 PM	H2 valve closed
11/10/2010	5:33:42 PM	BCl3 valve closed
11/10/2010	5:33:42 PM	PH3 valve closed
11/10/2010	5:33:42 PM	SiCl4 pre valve closed
11/10/2010	5:33:42 PM	SiCl4 post valve closed
11/10/2010	5:33:42 PM	Bubbler valve closed
11/10/2010	5:33:42 PM	Main Vac valve opened
11/10/2010	5:33:42 PM	Bypass valve opened
11/10/2010	5:33:42 PM	Helium MFC set to  0.000000
11/10/2010	5:33:42 PM	H2 MFC set to  0.000000
11/10/2010	5:33:42 PM	BCl3 MFC set to  0.000000
11/10/2010	5:33:42 PM	PHl3 MFC set to  0.000000
11/10/2010	5:33:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:33:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:33:42 PM	Tube furnace set to 0
11/10/2010	5:34:42 PM	H2 valve closed
11/10/2010	5:34:42 PM	BCl3 valve closed
11/10/2010	5:34:42 PM	PH3 valve closed
11/10/2010	5:34:42 PM	SiCl4 pre valve closed
11/10/2010	5:34:42 PM	SiCl4 post valve closed
11/10/2010	5:34:42 PM	Bubbler valve closed
11/10/2010	5:34:42 PM	Helium valve opened
11/10/2010	5:34:42 PM	Main Vac valve opened
11/10/2010	5:34:42 PM	Bypass valve opened
11/10/2010	5:34:42 PM	Helium MFC set to  100.000000
11/10/2010	5:34:42 PM	H2 MFC set to  0.000000
11/10/2010	5:34:42 PM	BCl3 MFC set to  0.000000
11/10/2010	5:34:42 PM	PHl3 MFC set to  0.000000
11/10/2010	5:34:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:34:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:34:42 PM	Tube furnace set to 0
11/10/2010	5:35:42 PM	Helium valve closed
11/10/2010	5:35:42 PM	H2 valve closed
11/10/2010	5:35:42 PM	BCl3 valve closed
11/10/2010	5:35:42 PM	PH3 valve closed
11/10/2010	5:35:42 PM	SiCl4 pre valve closed
11/10/2010	5:35:42 PM	SiCl4 post valve closed
11/10/2010	5:35:42 PM	Bubbler valve closed
11/10/2010	5:35:42 PM	Main Vac valve opened
11/10/2010	5:35:42 PM	Bypass valve opened
11/10/2010	5:35:42 PM	Helium MFC set to  0.000000
11/10/2010	5:35:42 PM	H2 MFC set to  0.000000
11/10/2010	5:35:42 PM	BCl3 MFC set to  0.000000
11/10/2010	5:35:42 PM	PHl3 MFC set to  0.000000
11/10/2010	5:35:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:35:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:35:42 PM	Tube furnace set to 0
11/10/2010	5:36:42 PM	H2 valve closed
11/10/2010	5:36:42 PM	BCl3 valve closed
11/10/2010	5:36:42 PM	PH3 valve closed
11/10/2010	5:36:42 PM	SiCl4 pre valve closed
11/10/2010	5:36:42 PM	SiCl4 post valve closed
11/10/2010	5:36:42 PM	Bubbler valve closed
11/10/2010	5:36:42 PM	Helium valve opened
11/10/2010	5:36:42 PM	Main Vac valve opened
11/10/2010	5:36:42 PM	Bypass valve opened
11/10/2010	5:36:42 PM	Helium MFC set to  100.000000
11/10/2010	5:36:42 PM	H2 MFC set to  0.000000
11/10/2010	5:36:42 PM	BCl3 MFC set to  0.000000
11/10/2010	5:36:42 PM	PHl3 MFC set to  0.000000
11/10/2010	5:36:42 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:36:42 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:36:43 PM	Tube furnace set to 0
11/10/2010	5:37:43 PM	Helium valve closed
11/10/2010	5:37:43 PM	H2 valve closed
11/10/2010	5:37:43 PM	BCl3 valve closed
11/10/2010	5:37:43 PM	PH3 valve closed
11/10/2010	5:37:43 PM	SiCl4 pre valve closed
11/10/2010	5:37:43 PM	SiCl4 post valve closed
11/10/2010	5:37:43 PM	Bubbler valve closed
11/10/2010	5:37:43 PM	Main Vac valve opened
11/10/2010	5:37:43 PM	Bypass valve opened
11/10/2010	5:37:43 PM	Helium MFC set to  0.000000
11/10/2010	5:37:43 PM	H2 MFC set to  0.000000
11/10/2010	5:37:43 PM	BCl3 MFC set to  0.000000
11/10/2010	5:37:43 PM	PHl3 MFC set to  0.000000
11/10/2010	5:37:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:37:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:37:43 PM	Tube furnace set to 0
11/10/2010	5:38:43 PM	H2 valve closed
11/10/2010	5:38:43 PM	BCl3 valve closed
11/10/2010	5:38:43 PM	PH3 valve closed
11/10/2010	5:38:43 PM	SiCl4 pre valve closed
11/10/2010	5:38:43 PM	SiCl4 post valve closed
11/10/2010	5:38:43 PM	Bubbler valve closed
11/10/2010	5:38:43 PM	Helium valve opened
11/10/2010	5:38:43 PM	Main Vac valve opened
11/10/2010	5:38:43 PM	Bypass valve opened
11/10/2010	5:38:43 PM	Helium MFC set to  100.000000
11/10/2010	5:38:43 PM	H2 MFC set to  0.000000
11/10/2010	5:38:43 PM	BCl3 MFC set to  0.000000
11/10/2010	5:38:43 PM	PHl3 MFC set to  0.000000
11/10/2010	5:38:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:38:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:38:43 PM	Tube furnace set to 0
11/10/2010	5:39:43 PM	Helium valve closed
11/10/2010	5:39:43 PM	H2 valve closed
11/10/2010	5:39:43 PM	BCl3 valve closed
11/10/2010	5:39:43 PM	PH3 valve closed
11/10/2010	5:39:43 PM	SiCl4 pre valve closed
11/10/2010	5:39:43 PM	SiCl4 post valve closed
11/10/2010	5:39:43 PM	Bubbler valve closed
11/10/2010	5:39:43 PM	Main Vac valve opened
11/10/2010	5:39:43 PM	Bypass valve opened
11/10/2010	5:39:43 PM	Helium MFC set to  0.000000
11/10/2010	5:39:43 PM	H2 MFC set to  0.000000
11/10/2010	5:39:43 PM	BCl3 MFC set to  0.000000
11/10/2010	5:39:43 PM	PHl3 MFC set to  0.000000
11/10/2010	5:39:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:39:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:39:43 PM	Tube furnace set to 0
11/10/2010	5:40:43 PM	H2 valve closed
11/10/2010	5:40:43 PM	BCl3 valve closed
11/10/2010	5:40:43 PM	PH3 valve closed
11/10/2010	5:40:43 PM	SiCl4 pre valve closed
11/10/2010	5:40:43 PM	SiCl4 post valve closed
11/10/2010	5:40:43 PM	Bubbler valve closed
11/10/2010	5:40:43 PM	Helium valve opened
11/10/2010	5:40:43 PM	Main Vac valve opened
11/10/2010	5:40:43 PM	Bypass valve opened
11/10/2010	5:40:43 PM	Helium MFC set to  100.000000
11/10/2010	5:40:43 PM	H2 MFC set to  0.000000
11/10/2010	5:40:43 PM	BCl3 MFC set to  0.000000
11/10/2010	5:40:43 PM	PHl3 MFC set to  0.000000
11/10/2010	5:40:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:40:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:40:43 PM	Tube furnace set to 0
11/10/2010	5:41:43 PM	Helium valve closed
11/10/2010	5:41:43 PM	H2 valve closed
11/10/2010	5:41:43 PM	BCl3 valve closed
11/10/2010	5:41:43 PM	PH3 valve closed
11/10/2010	5:41:43 PM	SiCl4 pre valve closed
11/10/2010	5:41:43 PM	SiCl4 post valve closed
11/10/2010	5:41:43 PM	Bubbler valve closed
11/10/2010	5:41:43 PM	Main Vac valve opened
11/10/2010	5:41:43 PM	Bypass valve opened
11/10/2010	5:41:43 PM	Helium MFC set to  0.000000
11/10/2010	5:41:43 PM	H2 MFC set to  0.000000
11/10/2010	5:41:43 PM	BCl3 MFC set to  0.000000
11/10/2010	5:41:43 PM	PHl3 MFC set to  0.000000
11/10/2010	5:41:43 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:41:43 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:41:44 PM	Tube furnace set to 0
11/10/2010	5:42:44 PM	H2 valve closed
11/10/2010	5:42:44 PM	BCl3 valve closed
11/10/2010	5:42:44 PM	PH3 valve closed
11/10/2010	5:42:44 PM	SiCl4 pre valve closed
11/10/2010	5:42:44 PM	SiCl4 post valve closed
11/10/2010	5:42:44 PM	Bubbler valve closed
11/10/2010	5:42:44 PM	Helium valve opened
11/10/2010	5:42:44 PM	Main Vac valve opened
11/10/2010	5:42:44 PM	Bypass valve opened
11/10/2010	5:42:44 PM	Helium MFC set to  100.000000
11/10/2010	5:42:44 PM	H2 MFC set to  0.000000
11/10/2010	5:42:44 PM	BCl3 MFC set to  0.000000
11/10/2010	5:42:44 PM	PHl3 MFC set to  0.000000
11/10/2010	5:42:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:42:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:42:44 PM	Tube furnace set to 0
11/10/2010	5:43:44 PM	Helium valve closed
11/10/2010	5:43:44 PM	H2 valve closed
11/10/2010	5:43:44 PM	BCl3 valve closed
11/10/2010	5:43:44 PM	PH3 valve closed
11/10/2010	5:43:44 PM	SiCl4 pre valve closed
11/10/2010	5:43:44 PM	SiCl4 post valve closed
11/10/2010	5:43:44 PM	Bubbler valve closed
11/10/2010	5:43:44 PM	Main Vac valve opened
11/10/2010	5:43:44 PM	Bypass valve opened
11/10/2010	5:43:44 PM	Helium MFC set to  0.000000
11/10/2010	5:43:44 PM	H2 MFC set to  0.000000
11/10/2010	5:43:44 PM	BCl3 MFC set to  0.000000
11/10/2010	5:43:44 PM	PHl3 MFC set to  0.000000
11/10/2010	5:43:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:43:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:43:44 PM	Tube furnace set to 0
11/10/2010	5:44:44 PM	H2 valve closed
11/10/2010	5:44:44 PM	BCl3 valve closed
11/10/2010	5:44:44 PM	PH3 valve closed
11/10/2010	5:44:44 PM	SiCl4 pre valve closed
11/10/2010	5:44:44 PM	SiCl4 post valve closed
11/10/2010	5:44:44 PM	Bubbler valve closed
11/10/2010	5:44:44 PM	Helium valve opened
11/10/2010	5:44:44 PM	Main Vac valve opened
11/10/2010	5:44:44 PM	Bypass valve opened
11/10/2010	5:44:44 PM	Helium MFC set to  100.000000
11/10/2010	5:44:44 PM	H2 MFC set to  0.000000
11/10/2010	5:44:44 PM	BCl3 MFC set to  0.000000
11/10/2010	5:44:44 PM	PHl3 MFC set to  0.000000
11/10/2010	5:44:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:44:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:44:44 PM	Tube furnace set to 0
11/10/2010	5:45:44 PM	Helium valve closed
11/10/2010	5:45:44 PM	H2 valve closed
11/10/2010	5:45:44 PM	BCl3 valve closed
11/10/2010	5:45:44 PM	PH3 valve closed
11/10/2010	5:45:44 PM	SiCl4 pre valve closed
11/10/2010	5:45:44 PM	SiCl4 post valve closed
11/10/2010	5:45:44 PM	Bubbler valve closed
11/10/2010	5:45:44 PM	Main Vac valve opened
11/10/2010	5:45:44 PM	Bypass valve opened
11/10/2010	5:45:44 PM	Helium MFC set to  0.000000
11/10/2010	5:45:44 PM	H2 MFC set to  0.000000
11/10/2010	5:45:44 PM	BCl3 MFC set to  0.000000
11/10/2010	5:45:44 PM	PHl3 MFC set to  0.000000
11/10/2010	5:45:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:45:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:45:44 PM	Tube furnace set to 0
11/10/2010	5:46:44 PM	H2 valve closed
11/10/2010	5:46:44 PM	BCl3 valve closed
11/10/2010	5:46:44 PM	PH3 valve closed
11/10/2010	5:46:44 PM	SiCl4 pre valve closed
11/10/2010	5:46:44 PM	SiCl4 post valve closed
11/10/2010	5:46:44 PM	Bubbler valve closed
11/10/2010	5:46:44 PM	Helium valve opened
11/10/2010	5:46:44 PM	Main Vac valve opened
11/10/2010	5:46:44 PM	Bypass valve opened
11/10/2010	5:46:44 PM	Helium MFC set to  100.000000
11/10/2010	5:46:44 PM	H2 MFC set to  0.000000
11/10/2010	5:46:44 PM	BCl3 MFC set to  0.000000
11/10/2010	5:46:44 PM	PHl3 MFC set to  0.000000
11/10/2010	5:46:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:46:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:46:45 PM	Tube furnace set to 0
11/10/2010	5:47:45 PM	Helium valve closed
11/10/2010	5:47:45 PM	H2 valve closed
11/10/2010	5:47:45 PM	BCl3 valve closed
11/10/2010	5:47:45 PM	PH3 valve closed
11/10/2010	5:47:45 PM	SiCl4 pre valve closed
11/10/2010	5:47:45 PM	SiCl4 post valve closed
11/10/2010	5:47:45 PM	Bubbler valve closed
11/10/2010	5:47:45 PM	Main Vac valve opened
11/10/2010	5:47:45 PM	Bypass valve opened
11/10/2010	5:47:45 PM	Helium MFC set to  0.000000
11/10/2010	5:47:45 PM	H2 MFC set to  0.000000
11/10/2010	5:47:45 PM	BCl3 MFC set to  0.000000
11/10/2010	5:47:45 PM	PHl3 MFC set to  0.000000
11/10/2010	5:47:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	5:47:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	5:47:45 PM	Tube furnace set to 0
11/10/2010	5:47:46 PM	Run finished at 5:47 PM
11/10/2010	5:47:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:07:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:07:55 PM	Recipe started at 6:07 PM
11/10/2010	6:07:55 PM	Helium valve closed
11/10/2010	6:07:55 PM	H2 valve closed
11/10/2010	6:07:55 PM	BCl3 valve closed
11/10/2010	6:07:55 PM	PH3 valve closed
11/10/2010	6:07:55 PM	SiCl4 pre valve closed
11/10/2010	6:07:55 PM	SiCl4 post valve closed
11/10/2010	6:07:55 PM	Main Vac valve closed
11/10/2010	6:07:55 PM	Bubbler valve closed
11/10/2010	6:07:55 PM	Bypass valve opened
11/10/2010	6:07:55 PM	Helium MFC set to  0.000000
11/10/2010	6:07:55 PM	H2 MFC set to  0.000000
11/10/2010	6:07:55 PM	BCl3 MFC set to  0.000000
11/10/2010	6:07:55 PM	PHl3 MFC set to  0.000000
11/10/2010	6:07:55 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:07:55 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:07:56 PM	Tube furnace set to 0
11/10/2010	6:07:56 PM	Helium valve closed
11/10/2010	6:07:56 PM	H2 valve closed
11/10/2010	6:07:56 PM	BCl3 valve closed
11/10/2010	6:07:56 PM	PH3 valve closed
11/10/2010	6:07:56 PM	SiCl4 pre valve closed
11/10/2010	6:07:56 PM	SiCl4 post valve closed
11/10/2010	6:07:56 PM	Bubbler valve closed
11/10/2010	6:07:56 PM	Main Vac valve opened
11/10/2010	6:07:56 PM	Bypass valve opened
11/10/2010	6:07:56 PM	Helium MFC set to  0.000000
11/10/2010	6:07:56 PM	H2 MFC set to  0.000000
11/10/2010	6:07:56 PM	BCl3 MFC set to  0.000000
11/10/2010	6:07:56 PM	PHl3 MFC set to  0.000000
11/10/2010	6:07:56 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:07:56 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:07:56 PM	Tube furnace set to 0
11/10/2010	6:07:59 PM	Run aborted at 6:07 PM
11/10/2010	6:07:59 PM	Helium valve closed
11/10/2010	6:07:59 PM	H2 valve closed
11/10/2010	6:07:59 PM	BCl3 valve closed
11/10/2010	6:07:59 PM	PH3 valve closed
11/10/2010	6:07:59 PM	SiCl4 pre valve closed
11/10/2010	6:07:59 PM	SiCl4 post valve closed
11/10/2010	6:07:59 PM	Bypass valve closed
11/10/2010	6:07:59 PM	Main Vac valve closed
11/10/2010	6:07:59 PM	Bubbler valve closed
11/10/2010	6:07:59 PM	Helium MFC set to  0.000000
11/10/2010	6:07:59 PM	H2 MFC set to  0.000000
11/10/2010	6:07:59 PM	BCl3 MFC set to  0.000000
11/10/2010	6:07:59 PM	PHl3 MFC set to  0.000000
11/10/2010	6:07:59 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:07:59 PM	Tube furnace set to 0
11/10/2010	6:07:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:08:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:08:13 PM	Recipe started at 6:08 PM
11/10/2010	6:08:13 PM	Helium valve closed
11/10/2010	6:08:13 PM	H2 valve closed
11/10/2010	6:08:13 PM	BCl3 valve closed
11/10/2010	6:08:13 PM	PH3 valve closed
11/10/2010	6:08:13 PM	SiCl4 pre valve closed
11/10/2010	6:08:13 PM	SiCl4 post valve closed
11/10/2010	6:08:13 PM	Main Vac valve closed
11/10/2010	6:08:13 PM	Bubbler valve closed
11/10/2010	6:08:13 PM	Bypass valve opened
11/10/2010	6:08:13 PM	Helium MFC set to  0.000000
11/10/2010	6:08:13 PM	H2 MFC set to  0.000000
11/10/2010	6:08:13 PM	BCl3 MFC set to  0.000000
11/10/2010	6:08:13 PM	PHl3 MFC set to  0.000000
11/10/2010	6:08:13 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:08:13 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:08:13 PM	Tube furnace set to 0
11/10/2010	6:08:14 PM	Helium valve closed
11/10/2010	6:08:14 PM	H2 valve closed
11/10/2010	6:08:14 PM	BCl3 valve closed
11/10/2010	6:08:14 PM	PH3 valve closed
11/10/2010	6:08:14 PM	SiCl4 pre valve closed
11/10/2010	6:08:14 PM	SiCl4 post valve closed
11/10/2010	6:08:14 PM	Bubbler valve closed
11/10/2010	6:08:14 PM	Main Vac valve opened
11/10/2010	6:08:14 PM	Bypass valve opened
11/10/2010	6:08:14 PM	Helium MFC set to  0.000000
11/10/2010	6:08:14 PM	H2 MFC set to  0.000000
11/10/2010	6:08:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:08:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:08:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:08:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:08:14 PM	Tube furnace set to 0
11/10/2010	6:09:14 PM	H2 valve closed
11/10/2010	6:09:14 PM	BCl3 valve closed
11/10/2010	6:09:14 PM	PH3 valve closed
11/10/2010	6:09:14 PM	SiCl4 pre valve closed
11/10/2010	6:09:14 PM	SiCl4 post valve closed
11/10/2010	6:09:14 PM	Bubbler valve closed
11/10/2010	6:09:14 PM	Helium valve opened
11/10/2010	6:09:14 PM	Main Vac valve opened
11/10/2010	6:09:14 PM	Bypass valve opened
11/10/2010	6:09:14 PM	Helium MFC set to  100.000000
11/10/2010	6:09:14 PM	H2 MFC set to  0.000000
11/10/2010	6:09:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:09:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:09:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:09:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:09:14 PM	Tube furnace set to 0
11/10/2010	6:10:14 PM	Helium valve closed
11/10/2010	6:10:14 PM	H2 valve closed
11/10/2010	6:10:14 PM	BCl3 valve closed
11/10/2010	6:10:14 PM	PH3 valve closed
11/10/2010	6:10:14 PM	SiCl4 pre valve closed
11/10/2010	6:10:14 PM	SiCl4 post valve closed
11/10/2010	6:10:14 PM	Bubbler valve closed
11/10/2010	6:10:14 PM	Main Vac valve opened
11/10/2010	6:10:14 PM	Bypass valve opened
11/10/2010	6:10:14 PM	Helium MFC set to  0.000000
11/10/2010	6:10:14 PM	H2 MFC set to  0.000000
11/10/2010	6:10:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:10:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:10:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:10:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:10:14 PM	Tube furnace set to 0
11/10/2010	6:11:14 PM	H2 valve closed
11/10/2010	6:11:14 PM	BCl3 valve closed
11/10/2010	6:11:14 PM	PH3 valve closed
11/10/2010	6:11:14 PM	SiCl4 pre valve closed
11/10/2010	6:11:14 PM	SiCl4 post valve closed
11/10/2010	6:11:14 PM	Bubbler valve closed
11/10/2010	6:11:14 PM	Helium valve opened
11/10/2010	6:11:14 PM	Main Vac valve opened
11/10/2010	6:11:14 PM	Bypass valve opened
11/10/2010	6:11:14 PM	Helium MFC set to  100.000000
11/10/2010	6:11:14 PM	H2 MFC set to  0.000000
11/10/2010	6:11:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:11:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:11:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:11:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:11:14 PM	Tube furnace set to 0
11/10/2010	6:12:14 PM	Helium valve closed
11/10/2010	6:12:14 PM	H2 valve closed
11/10/2010	6:12:14 PM	BCl3 valve closed
11/10/2010	6:12:14 PM	PH3 valve closed
11/10/2010	6:12:14 PM	SiCl4 pre valve closed
11/10/2010	6:12:14 PM	SiCl4 post valve closed
11/10/2010	6:12:14 PM	Bubbler valve closed
11/10/2010	6:12:14 PM	Main Vac valve opened
11/10/2010	6:12:14 PM	Bypass valve opened
11/10/2010	6:12:14 PM	Helium MFC set to  0.000000
11/10/2010	6:12:14 PM	H2 MFC set to  0.000000
11/10/2010	6:12:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:12:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:12:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:12:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:12:15 PM	Tube furnace set to 0
11/10/2010	6:13:15 PM	H2 valve closed
11/10/2010	6:13:15 PM	BCl3 valve closed
11/10/2010	6:13:15 PM	PH3 valve closed
11/10/2010	6:13:15 PM	SiCl4 pre valve closed
11/10/2010	6:13:15 PM	SiCl4 post valve closed
11/10/2010	6:13:15 PM	Bubbler valve closed
11/10/2010	6:13:15 PM	Helium valve opened
11/10/2010	6:13:15 PM	Main Vac valve opened
11/10/2010	6:13:15 PM	Bypass valve opened
11/10/2010	6:13:15 PM	Helium MFC set to  100.000000
11/10/2010	6:13:15 PM	H2 MFC set to  0.000000
11/10/2010	6:13:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:13:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:13:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:13:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:13:15 PM	Tube furnace set to 0
11/10/2010	6:14:15 PM	Helium valve closed
11/10/2010	6:14:15 PM	H2 valve closed
11/10/2010	6:14:15 PM	BCl3 valve closed
11/10/2010	6:14:15 PM	PH3 valve closed
11/10/2010	6:14:15 PM	SiCl4 pre valve closed
11/10/2010	6:14:15 PM	SiCl4 post valve closed
11/10/2010	6:14:15 PM	Bubbler valve closed
11/10/2010	6:14:15 PM	Main Vac valve opened
11/10/2010	6:14:15 PM	Bypass valve opened
11/10/2010	6:14:15 PM	Helium MFC set to  0.000000
11/10/2010	6:14:15 PM	H2 MFC set to  0.000000
11/10/2010	6:14:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:14:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:14:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:14:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:14:15 PM	Tube furnace set to 0
11/10/2010	6:15:15 PM	H2 valve closed
11/10/2010	6:15:15 PM	BCl3 valve closed
11/10/2010	6:15:15 PM	PH3 valve closed
11/10/2010	6:15:15 PM	SiCl4 pre valve closed
11/10/2010	6:15:15 PM	SiCl4 post valve closed
11/10/2010	6:15:15 PM	Bubbler valve closed
11/10/2010	6:15:15 PM	Helium valve opened
11/10/2010	6:15:15 PM	Main Vac valve opened
11/10/2010	6:15:15 PM	Bypass valve opened
11/10/2010	6:15:15 PM	Helium MFC set to  100.000000
11/10/2010	6:15:15 PM	H2 MFC set to  0.000000
11/10/2010	6:15:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:15:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:15:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:15:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:15:15 PM	Tube furnace set to 0
11/10/2010	6:16:15 PM	Helium valve closed
11/10/2010	6:16:15 PM	H2 valve closed
11/10/2010	6:16:15 PM	BCl3 valve closed
11/10/2010	6:16:15 PM	PH3 valve closed
11/10/2010	6:16:15 PM	SiCl4 pre valve closed
11/10/2010	6:16:15 PM	SiCl4 post valve closed
11/10/2010	6:16:15 PM	Bubbler valve closed
11/10/2010	6:16:15 PM	Main Vac valve opened
11/10/2010	6:16:15 PM	Bypass valve opened
11/10/2010	6:16:15 PM	Helium MFC set to  0.000000
11/10/2010	6:16:15 PM	H2 MFC set to  0.000000
11/10/2010	6:16:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:16:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:16:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:16:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:16:15 PM	Tube furnace set to 0
11/10/2010	6:17:15 PM	H2 valve closed
11/10/2010	6:17:15 PM	BCl3 valve closed
11/10/2010	6:17:15 PM	PH3 valve closed
11/10/2010	6:17:15 PM	SiCl4 pre valve closed
11/10/2010	6:17:15 PM	SiCl4 post valve closed
11/10/2010	6:17:15 PM	Bubbler valve closed
11/10/2010	6:17:15 PM	Helium valve opened
11/10/2010	6:17:15 PM	Main Vac valve opened
11/10/2010	6:17:15 PM	Bypass valve opened
11/10/2010	6:17:15 PM	Helium MFC set to  100.000000
11/10/2010	6:17:15 PM	H2 MFC set to  0.000000
11/10/2010	6:17:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:17:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:17:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:17:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:17:16 PM	Tube furnace set to 0
11/10/2010	6:18:16 PM	Helium valve closed
11/10/2010	6:18:16 PM	H2 valve closed
11/10/2010	6:18:16 PM	BCl3 valve closed
11/10/2010	6:18:16 PM	PH3 valve closed
11/10/2010	6:18:16 PM	SiCl4 pre valve closed
11/10/2010	6:18:16 PM	SiCl4 post valve closed
11/10/2010	6:18:16 PM	Bubbler valve closed
11/10/2010	6:18:16 PM	Main Vac valve opened
11/10/2010	6:18:16 PM	Bypass valve opened
11/10/2010	6:18:16 PM	Helium MFC set to  0.000000
11/10/2010	6:18:16 PM	H2 MFC set to  0.000000
11/10/2010	6:18:16 PM	BCl3 MFC set to  0.000000
11/10/2010	6:18:16 PM	PHl3 MFC set to  0.000000
11/10/2010	6:18:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:18:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:18:16 PM	Tube furnace set to 0
11/10/2010	6:19:16 PM	H2 valve closed
11/10/2010	6:19:16 PM	BCl3 valve closed
11/10/2010	6:19:16 PM	PH3 valve closed
11/10/2010	6:19:16 PM	SiCl4 pre valve closed
11/10/2010	6:19:16 PM	SiCl4 post valve closed
11/10/2010	6:19:16 PM	Bubbler valve closed
11/10/2010	6:19:16 PM	Helium valve opened
11/10/2010	6:19:16 PM	Main Vac valve opened
11/10/2010	6:19:16 PM	Bypass valve opened
11/10/2010	6:19:16 PM	Helium MFC set to  100.000000
11/10/2010	6:19:16 PM	H2 MFC set to  0.000000
11/10/2010	6:19:16 PM	BCl3 MFC set to  0.000000
11/10/2010	6:19:16 PM	PHl3 MFC set to  0.000000
11/10/2010	6:19:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:19:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:19:16 PM	Tube furnace set to 0
11/10/2010	6:20:16 PM	Helium valve closed
11/10/2010	6:20:16 PM	H2 valve closed
11/10/2010	6:20:16 PM	BCl3 valve closed
11/10/2010	6:20:16 PM	PH3 valve closed
11/10/2010	6:20:16 PM	SiCl4 pre valve closed
11/10/2010	6:20:16 PM	SiCl4 post valve closed
11/10/2010	6:20:16 PM	Bubbler valve closed
11/10/2010	6:20:16 PM	Main Vac valve opened
11/10/2010	6:20:16 PM	Bypass valve opened
11/10/2010	6:20:16 PM	Helium MFC set to  0.000000
11/10/2010	6:20:16 PM	H2 MFC set to  0.000000
11/10/2010	6:20:16 PM	BCl3 MFC set to  0.000000
11/10/2010	6:20:16 PM	PHl3 MFC set to  0.000000
11/10/2010	6:20:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:20:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:20:16 PM	Tube furnace set to 0
11/10/2010	6:21:16 PM	H2 valve closed
11/10/2010	6:21:16 PM	BCl3 valve closed
11/10/2010	6:21:16 PM	PH3 valve closed
11/10/2010	6:21:16 PM	SiCl4 pre valve closed
11/10/2010	6:21:16 PM	SiCl4 post valve closed
11/10/2010	6:21:16 PM	Bubbler valve closed
11/10/2010	6:21:16 PM	Helium valve opened
11/10/2010	6:21:16 PM	Main Vac valve opened
11/10/2010	6:21:16 PM	Bypass valve opened
11/10/2010	6:21:16 PM	Helium MFC set to  100.000000
11/10/2010	6:21:16 PM	H2 MFC set to  0.000000
11/10/2010	6:21:16 PM	BCl3 MFC set to  0.000000
11/10/2010	6:21:16 PM	PHl3 MFC set to  0.000000
11/10/2010	6:21:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:21:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:21:16 PM	Tube furnace set to 0
11/10/2010	6:22:16 PM	Helium valve closed
11/10/2010	6:22:16 PM	H2 valve closed
11/10/2010	6:22:16 PM	BCl3 valve closed
11/10/2010	6:22:16 PM	PH3 valve closed
11/10/2010	6:22:16 PM	SiCl4 pre valve closed
11/10/2010	6:22:16 PM	SiCl4 post valve closed
11/10/2010	6:22:16 PM	Bubbler valve closed
11/10/2010	6:22:16 PM	Main Vac valve opened
11/10/2010	6:22:16 PM	Bypass valve opened
11/10/2010	6:22:16 PM	Helium MFC set to  0.000000
11/10/2010	6:22:16 PM	H2 MFC set to  0.000000
11/10/2010	6:22:16 PM	BCl3 MFC set to  0.000000
11/10/2010	6:22:16 PM	PHl3 MFC set to  0.000000
11/10/2010	6:22:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:22:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:22:17 PM	Tube furnace set to 0
11/10/2010	6:23:17 PM	H2 valve closed
11/10/2010	6:23:17 PM	BCl3 valve closed
11/10/2010	6:23:17 PM	PH3 valve closed
11/10/2010	6:23:17 PM	SiCl4 pre valve closed
11/10/2010	6:23:17 PM	SiCl4 post valve closed
11/10/2010	6:23:17 PM	Bubbler valve closed
11/10/2010	6:23:17 PM	Helium valve opened
11/10/2010	6:23:17 PM	Main Vac valve opened
11/10/2010	6:23:17 PM	Bypass valve opened
11/10/2010	6:23:17 PM	Helium MFC set to  100.000000
11/10/2010	6:23:17 PM	H2 MFC set to  0.000000
11/10/2010	6:23:17 PM	BCl3 MFC set to  0.000000
11/10/2010	6:23:17 PM	PHl3 MFC set to  0.000000
11/10/2010	6:23:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:23:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:23:17 PM	Tube furnace set to 0
11/10/2010	6:24:17 PM	Helium valve closed
11/10/2010	6:24:17 PM	H2 valve closed
11/10/2010	6:24:17 PM	BCl3 valve closed
11/10/2010	6:24:17 PM	PH3 valve closed
11/10/2010	6:24:17 PM	SiCl4 pre valve closed
11/10/2010	6:24:17 PM	SiCl4 post valve closed
11/10/2010	6:24:17 PM	Bubbler valve closed
11/10/2010	6:24:17 PM	Main Vac valve opened
11/10/2010	6:24:17 PM	Bypass valve opened
11/10/2010	6:24:17 PM	Helium MFC set to  0.000000
11/10/2010	6:24:17 PM	H2 MFC set to  0.000000
11/10/2010	6:24:17 PM	BCl3 MFC set to  0.000000
11/10/2010	6:24:17 PM	PHl3 MFC set to  0.000000
11/10/2010	6:24:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:24:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:24:17 PM	Tube furnace set to 0
11/10/2010	6:25:17 PM	H2 valve closed
11/10/2010	6:25:17 PM	BCl3 valve closed
11/10/2010	6:25:17 PM	PH3 valve closed
11/10/2010	6:25:17 PM	SiCl4 pre valve closed
11/10/2010	6:25:17 PM	SiCl4 post valve closed
11/10/2010	6:25:17 PM	Bubbler valve closed
11/10/2010	6:25:17 PM	Helium valve opened
11/10/2010	6:25:17 PM	Main Vac valve opened
11/10/2010	6:25:17 PM	Bypass valve opened
11/10/2010	6:25:17 PM	Helium MFC set to  100.000000
11/10/2010	6:25:17 PM	H2 MFC set to  0.000000
11/10/2010	6:25:17 PM	BCl3 MFC set to  0.000000
11/10/2010	6:25:17 PM	PHl3 MFC set to  0.000000
11/10/2010	6:25:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:25:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:25:17 PM	Tube furnace set to 0
11/10/2010	6:26:17 PM	Helium valve closed
11/10/2010	6:26:17 PM	H2 valve closed
11/10/2010	6:26:17 PM	BCl3 valve closed
11/10/2010	6:26:17 PM	PH3 valve closed
11/10/2010	6:26:17 PM	SiCl4 pre valve closed
11/10/2010	6:26:17 PM	SiCl4 post valve closed
11/10/2010	6:26:17 PM	Bubbler valve closed
11/10/2010	6:26:17 PM	Main Vac valve opened
11/10/2010	6:26:17 PM	Bypass valve opened
11/10/2010	6:26:17 PM	Helium MFC set to  0.000000
11/10/2010	6:26:17 PM	H2 MFC set to  0.000000
11/10/2010	6:26:17 PM	BCl3 MFC set to  0.000000
11/10/2010	6:26:17 PM	PHl3 MFC set to  0.000000
11/10/2010	6:26:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:26:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:26:17 PM	Tube furnace set to 0
11/10/2010	6:27:17 PM	H2 valve closed
11/10/2010	6:27:17 PM	BCl3 valve closed
11/10/2010	6:27:17 PM	PH3 valve closed
11/10/2010	6:27:17 PM	SiCl4 pre valve closed
11/10/2010	6:27:17 PM	SiCl4 post valve closed
11/10/2010	6:27:17 PM	Bubbler valve closed
11/10/2010	6:27:17 PM	Helium valve opened
11/10/2010	6:27:17 PM	Main Vac valve opened
11/10/2010	6:27:17 PM	Bypass valve opened
11/10/2010	6:27:17 PM	Helium MFC set to  100.000000
11/10/2010	6:27:17 PM	H2 MFC set to  0.000000
11/10/2010	6:27:17 PM	BCl3 MFC set to  0.000000
11/10/2010	6:27:17 PM	PHl3 MFC set to  0.000000
11/10/2010	6:27:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:27:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:27:18 PM	Tube furnace set to 0
11/10/2010	6:28:18 PM	Helium valve closed
11/10/2010	6:28:18 PM	H2 valve closed
11/10/2010	6:28:18 PM	BCl3 valve closed
11/10/2010	6:28:18 PM	PH3 valve closed
11/10/2010	6:28:18 PM	SiCl4 pre valve closed
11/10/2010	6:28:18 PM	SiCl4 post valve closed
11/10/2010	6:28:18 PM	Bubbler valve closed
11/10/2010	6:28:18 PM	Main Vac valve opened
11/10/2010	6:28:18 PM	Bypass valve opened
11/10/2010	6:28:18 PM	Helium MFC set to  0.000000
11/10/2010	6:28:18 PM	H2 MFC set to  0.000000
11/10/2010	6:28:18 PM	BCl3 MFC set to  0.000000
11/10/2010	6:28:18 PM	PHl3 MFC set to  0.000000
11/10/2010	6:28:18 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:28:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:28:18 PM	Tube furnace set to 0
11/10/2010	6:28:19 PM	Run finished at 6:28 PM
11/10/2010	6:28:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:47:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	6:47:13 PM	Recipe started at 6:47 PM
11/10/2010	6:47:13 PM	Helium valve closed
11/10/2010	6:47:13 PM	H2 valve closed
11/10/2010	6:47:13 PM	BCl3 valve closed
11/10/2010	6:47:13 PM	PH3 valve closed
11/10/2010	6:47:13 PM	SiCl4 pre valve closed
11/10/2010	6:47:13 PM	SiCl4 post valve closed
11/10/2010	6:47:13 PM	Main Vac valve closed
11/10/2010	6:47:13 PM	Bubbler valve closed
11/10/2010	6:47:13 PM	Bypass valve opened
11/10/2010	6:47:13 PM	Helium MFC set to  0.000000
11/10/2010	6:47:13 PM	H2 MFC set to  0.000000
11/10/2010	6:47:13 PM	BCl3 MFC set to  0.000000
11/10/2010	6:47:13 PM	PHl3 MFC set to  0.000000
11/10/2010	6:47:13 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:47:13 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:47:13 PM	Tube furnace set to 0
11/10/2010	6:47:13 PM	Helium valve closed
11/10/2010	6:47:13 PM	H2 valve closed
11/10/2010	6:47:13 PM	BCl3 valve closed
11/10/2010	6:47:13 PM	PH3 valve closed
11/10/2010	6:47:13 PM	SiCl4 pre valve closed
11/10/2010	6:47:13 PM	SiCl4 post valve closed
11/10/2010	6:47:13 PM	Bubbler valve closed
11/10/2010	6:47:13 PM	Main Vac valve opened
11/10/2010	6:47:13 PM	Bypass valve opened
11/10/2010	6:47:13 PM	Helium MFC set to  0.000000
11/10/2010	6:47:13 PM	H2 MFC set to  0.000000
11/10/2010	6:47:13 PM	BCl3 MFC set to  0.000000
11/10/2010	6:47:13 PM	PHl3 MFC set to  0.000000
11/10/2010	6:47:13 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:47:13 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:47:13 PM	Tube furnace set to 0
11/10/2010	6:48:13 PM	H2 valve closed
11/10/2010	6:48:13 PM	BCl3 valve closed
11/10/2010	6:48:13 PM	PH3 valve closed
11/10/2010	6:48:13 PM	SiCl4 pre valve closed
11/10/2010	6:48:13 PM	SiCl4 post valve closed
11/10/2010	6:48:13 PM	Bubbler valve closed
11/10/2010	6:48:13 PM	Helium valve opened
11/10/2010	6:48:13 PM	Main Vac valve opened
11/10/2010	6:48:13 PM	Bypass valve opened
11/10/2010	6:48:13 PM	Helium MFC set to  100.000000
11/10/2010	6:48:13 PM	H2 MFC set to  0.000000
11/10/2010	6:48:13 PM	BCl3 MFC set to  0.000000
11/10/2010	6:48:13 PM	PHl3 MFC set to  0.000000
11/10/2010	6:48:13 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:48:13 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:48:13 PM	Tube furnace set to 0
11/10/2010	6:49:13 PM	Helium valve closed
11/10/2010	6:49:13 PM	H2 valve closed
11/10/2010	6:49:13 PM	BCl3 valve closed
11/10/2010	6:49:13 PM	PH3 valve closed
11/10/2010	6:49:13 PM	SiCl4 pre valve closed
11/10/2010	6:49:13 PM	SiCl4 post valve closed
11/10/2010	6:49:13 PM	Bubbler valve closed
11/10/2010	6:49:13 PM	Main Vac valve opened
11/10/2010	6:49:13 PM	Bypass valve opened
11/10/2010	6:49:13 PM	Helium MFC set to  0.000000
11/10/2010	6:49:13 PM	H2 MFC set to  0.000000
11/10/2010	6:49:13 PM	BCl3 MFC set to  0.000000
11/10/2010	6:49:13 PM	PHl3 MFC set to  0.000000
11/10/2010	6:49:13 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:49:13 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:49:14 PM	Tube furnace set to 0
11/10/2010	6:50:14 PM	H2 valve closed
11/10/2010	6:50:14 PM	BCl3 valve closed
11/10/2010	6:50:14 PM	PH3 valve closed
11/10/2010	6:50:14 PM	SiCl4 pre valve closed
11/10/2010	6:50:14 PM	SiCl4 post valve closed
11/10/2010	6:50:14 PM	Bubbler valve closed
11/10/2010	6:50:14 PM	Helium valve opened
11/10/2010	6:50:14 PM	Main Vac valve opened
11/10/2010	6:50:14 PM	Bypass valve opened
11/10/2010	6:50:14 PM	Helium MFC set to  100.000000
11/10/2010	6:50:14 PM	H2 MFC set to  0.000000
11/10/2010	6:50:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:50:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:50:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:50:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:50:14 PM	Tube furnace set to 0
11/10/2010	6:51:14 PM	Helium valve closed
11/10/2010	6:51:14 PM	H2 valve closed
11/10/2010	6:51:14 PM	BCl3 valve closed
11/10/2010	6:51:14 PM	PH3 valve closed
11/10/2010	6:51:14 PM	SiCl4 pre valve closed
11/10/2010	6:51:14 PM	SiCl4 post valve closed
11/10/2010	6:51:14 PM	Bubbler valve closed
11/10/2010	6:51:14 PM	Main Vac valve opened
11/10/2010	6:51:14 PM	Bypass valve opened
11/10/2010	6:51:14 PM	Helium MFC set to  0.000000
11/10/2010	6:51:14 PM	H2 MFC set to  0.000000
11/10/2010	6:51:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:51:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:51:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:51:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:51:14 PM	Tube furnace set to 0
11/10/2010	6:52:14 PM	H2 valve closed
11/10/2010	6:52:14 PM	BCl3 valve closed
11/10/2010	6:52:14 PM	PH3 valve closed
11/10/2010	6:52:14 PM	SiCl4 pre valve closed
11/10/2010	6:52:14 PM	SiCl4 post valve closed
11/10/2010	6:52:14 PM	Bubbler valve closed
11/10/2010	6:52:14 PM	Helium valve opened
11/10/2010	6:52:14 PM	Main Vac valve opened
11/10/2010	6:52:14 PM	Bypass valve opened
11/10/2010	6:52:14 PM	Helium MFC set to  100.000000
11/10/2010	6:52:14 PM	H2 MFC set to  0.000000
11/10/2010	6:52:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:52:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:52:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:52:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:52:14 PM	Tube furnace set to 0
11/10/2010	6:53:14 PM	Helium valve closed
11/10/2010	6:53:14 PM	H2 valve closed
11/10/2010	6:53:14 PM	BCl3 valve closed
11/10/2010	6:53:14 PM	PH3 valve closed
11/10/2010	6:53:14 PM	SiCl4 pre valve closed
11/10/2010	6:53:14 PM	SiCl4 post valve closed
11/10/2010	6:53:14 PM	Bubbler valve closed
11/10/2010	6:53:14 PM	Main Vac valve opened
11/10/2010	6:53:14 PM	Bypass valve opened
11/10/2010	6:53:14 PM	Helium MFC set to  0.000000
11/10/2010	6:53:14 PM	H2 MFC set to  0.000000
11/10/2010	6:53:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:53:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:53:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:53:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:53:14 PM	Tube furnace set to 0
11/10/2010	6:54:14 PM	H2 valve closed
11/10/2010	6:54:14 PM	BCl3 valve closed
11/10/2010	6:54:14 PM	PH3 valve closed
11/10/2010	6:54:14 PM	SiCl4 pre valve closed
11/10/2010	6:54:14 PM	SiCl4 post valve closed
11/10/2010	6:54:14 PM	Bubbler valve closed
11/10/2010	6:54:14 PM	Helium valve opened
11/10/2010	6:54:14 PM	Main Vac valve opened
11/10/2010	6:54:14 PM	Bypass valve opened
11/10/2010	6:54:14 PM	Helium MFC set to  100.000000
11/10/2010	6:54:14 PM	H2 MFC set to  0.000000
11/10/2010	6:54:14 PM	BCl3 MFC set to  0.000000
11/10/2010	6:54:14 PM	PHl3 MFC set to  0.000000
11/10/2010	6:54:14 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:54:14 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:54:15 PM	Tube furnace set to 0
11/10/2010	6:55:15 PM	Helium valve closed
11/10/2010	6:55:15 PM	H2 valve closed
11/10/2010	6:55:15 PM	BCl3 valve closed
11/10/2010	6:55:15 PM	PH3 valve closed
11/10/2010	6:55:15 PM	SiCl4 pre valve closed
11/10/2010	6:55:15 PM	SiCl4 post valve closed
11/10/2010	6:55:15 PM	Bubbler valve closed
11/10/2010	6:55:15 PM	Main Vac valve opened
11/10/2010	6:55:15 PM	Bypass valve opened
11/10/2010	6:55:15 PM	Helium MFC set to  0.000000
11/10/2010	6:55:15 PM	H2 MFC set to  0.000000
11/10/2010	6:55:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:55:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:55:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:55:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:55:15 PM	Tube furnace set to 0
11/10/2010	6:56:15 PM	H2 valve closed
11/10/2010	6:56:15 PM	BCl3 valve closed
11/10/2010	6:56:15 PM	PH3 valve closed
11/10/2010	6:56:15 PM	SiCl4 pre valve closed
11/10/2010	6:56:15 PM	SiCl4 post valve closed
11/10/2010	6:56:15 PM	Bubbler valve closed
11/10/2010	6:56:15 PM	Helium valve opened
11/10/2010	6:56:15 PM	Main Vac valve opened
11/10/2010	6:56:15 PM	Bypass valve opened
11/10/2010	6:56:15 PM	Helium MFC set to  100.000000
11/10/2010	6:56:15 PM	H2 MFC set to  0.000000
11/10/2010	6:56:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:56:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:56:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:56:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:56:15 PM	Tube furnace set to 0
11/10/2010	6:57:15 PM	Helium valve closed
11/10/2010	6:57:15 PM	H2 valve closed
11/10/2010	6:57:15 PM	BCl3 valve closed
11/10/2010	6:57:15 PM	PH3 valve closed
11/10/2010	6:57:15 PM	SiCl4 pre valve closed
11/10/2010	6:57:15 PM	SiCl4 post valve closed
11/10/2010	6:57:15 PM	Bubbler valve closed
11/10/2010	6:57:15 PM	Main Vac valve opened
11/10/2010	6:57:15 PM	Bypass valve opened
11/10/2010	6:57:15 PM	Helium MFC set to  0.000000
11/10/2010	6:57:15 PM	H2 MFC set to  0.000000
11/10/2010	6:57:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:57:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:57:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:57:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:57:15 PM	Tube furnace set to 0
11/10/2010	6:58:15 PM	H2 valve closed
11/10/2010	6:58:15 PM	BCl3 valve closed
11/10/2010	6:58:15 PM	PH3 valve closed
11/10/2010	6:58:15 PM	SiCl4 pre valve closed
11/10/2010	6:58:15 PM	SiCl4 post valve closed
11/10/2010	6:58:15 PM	Bubbler valve closed
11/10/2010	6:58:15 PM	Helium valve opened
11/10/2010	6:58:15 PM	Main Vac valve opened
11/10/2010	6:58:15 PM	Bypass valve opened
11/10/2010	6:58:15 PM	Helium MFC set to  100.000000
11/10/2010	6:58:15 PM	H2 MFC set to  0.000000
11/10/2010	6:58:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:58:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:58:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:58:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:58:15 PM	Tube furnace set to 0
11/10/2010	6:59:15 PM	Helium valve closed
11/10/2010	6:59:15 PM	H2 valve closed
11/10/2010	6:59:15 PM	BCl3 valve closed
11/10/2010	6:59:15 PM	PH3 valve closed
11/10/2010	6:59:15 PM	SiCl4 pre valve closed
11/10/2010	6:59:15 PM	SiCl4 post valve closed
11/10/2010	6:59:15 PM	Bubbler valve closed
11/10/2010	6:59:15 PM	Main Vac valve opened
11/10/2010	6:59:15 PM	Bypass valve opened
11/10/2010	6:59:15 PM	Helium MFC set to  0.000000
11/10/2010	6:59:15 PM	H2 MFC set to  0.000000
11/10/2010	6:59:15 PM	BCl3 MFC set to  0.000000
11/10/2010	6:59:15 PM	PHl3 MFC set to  0.000000
11/10/2010	6:59:15 PM	SiCl4 MFC set to  0.000000
11/10/2010	6:59:15 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	6:59:16 PM	Tube furnace set to 0
11/10/2010	7:00:16 PM	H2 valve closed
11/10/2010	7:00:16 PM	BCl3 valve closed
11/10/2010	7:00:16 PM	PH3 valve closed
11/10/2010	7:00:16 PM	SiCl4 pre valve closed
11/10/2010	7:00:16 PM	SiCl4 post valve closed
11/10/2010	7:00:16 PM	Bubbler valve closed
11/10/2010	7:00:16 PM	Helium valve opened
11/10/2010	7:00:16 PM	Main Vac valve opened
11/10/2010	7:00:16 PM	Bypass valve opened
11/10/2010	7:00:16 PM	Helium MFC set to  100.000000
11/10/2010	7:00:16 PM	H2 MFC set to  0.000000
11/10/2010	7:00:16 PM	BCl3 MFC set to  0.000000
11/10/2010	7:00:16 PM	PHl3 MFC set to  0.000000
11/10/2010	7:00:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:00:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:00:16 PM	Tube furnace set to 0
11/10/2010	7:01:16 PM	Helium valve closed
11/10/2010	7:01:16 PM	H2 valve closed
11/10/2010	7:01:16 PM	BCl3 valve closed
11/10/2010	7:01:16 PM	PH3 valve closed
11/10/2010	7:01:16 PM	SiCl4 pre valve closed
11/10/2010	7:01:16 PM	SiCl4 post valve closed
11/10/2010	7:01:16 PM	Bubbler valve closed
11/10/2010	7:01:16 PM	Main Vac valve opened
11/10/2010	7:01:16 PM	Bypass valve opened
11/10/2010	7:01:16 PM	Helium MFC set to  0.000000
11/10/2010	7:01:16 PM	H2 MFC set to  0.000000
11/10/2010	7:01:16 PM	BCl3 MFC set to  0.000000
11/10/2010	7:01:16 PM	PHl3 MFC set to  0.000000
11/10/2010	7:01:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:01:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:01:16 PM	Tube furnace set to 0
11/10/2010	7:02:16 PM	H2 valve closed
11/10/2010	7:02:16 PM	BCl3 valve closed
11/10/2010	7:02:16 PM	PH3 valve closed
11/10/2010	7:02:16 PM	SiCl4 pre valve closed
11/10/2010	7:02:16 PM	SiCl4 post valve closed
11/10/2010	7:02:16 PM	Bubbler valve closed
11/10/2010	7:02:16 PM	Helium valve opened
11/10/2010	7:02:16 PM	Main Vac valve opened
11/10/2010	7:02:16 PM	Bypass valve opened
11/10/2010	7:02:16 PM	Helium MFC set to  100.000000
11/10/2010	7:02:16 PM	H2 MFC set to  0.000000
11/10/2010	7:02:16 PM	BCl3 MFC set to  0.000000
11/10/2010	7:02:16 PM	PHl3 MFC set to  0.000000
11/10/2010	7:02:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:02:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:02:16 PM	Tube furnace set to 0
11/10/2010	7:03:16 PM	Helium valve closed
11/10/2010	7:03:16 PM	H2 valve closed
11/10/2010	7:03:16 PM	BCl3 valve closed
11/10/2010	7:03:16 PM	PH3 valve closed
11/10/2010	7:03:16 PM	SiCl4 pre valve closed
11/10/2010	7:03:16 PM	SiCl4 post valve closed
11/10/2010	7:03:16 PM	Bubbler valve closed
11/10/2010	7:03:16 PM	Main Vac valve opened
11/10/2010	7:03:16 PM	Bypass valve opened
11/10/2010	7:03:16 PM	Helium MFC set to  0.000000
11/10/2010	7:03:16 PM	H2 MFC set to  0.000000
11/10/2010	7:03:16 PM	BCl3 MFC set to  0.000000
11/10/2010	7:03:16 PM	PHl3 MFC set to  0.000000
11/10/2010	7:03:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:03:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:03:16 PM	Tube furnace set to 0
11/10/2010	7:04:16 PM	H2 valve closed
11/10/2010	7:04:16 PM	BCl3 valve closed
11/10/2010	7:04:16 PM	PH3 valve closed
11/10/2010	7:04:16 PM	SiCl4 pre valve closed
11/10/2010	7:04:16 PM	SiCl4 post valve closed
11/10/2010	7:04:16 PM	Bubbler valve closed
11/10/2010	7:04:16 PM	Helium valve opened
11/10/2010	7:04:16 PM	Main Vac valve opened
11/10/2010	7:04:16 PM	Bypass valve opened
11/10/2010	7:04:16 PM	Helium MFC set to  100.000000
11/10/2010	7:04:16 PM	H2 MFC set to  0.000000
11/10/2010	7:04:16 PM	BCl3 MFC set to  0.000000
11/10/2010	7:04:16 PM	PHl3 MFC set to  0.000000
11/10/2010	7:04:16 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:04:16 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:04:17 PM	Tube furnace set to 0
11/10/2010	7:05:17 PM	Helium valve closed
11/10/2010	7:05:17 PM	H2 valve closed
11/10/2010	7:05:17 PM	BCl3 valve closed
11/10/2010	7:05:17 PM	PH3 valve closed
11/10/2010	7:05:17 PM	SiCl4 pre valve closed
11/10/2010	7:05:17 PM	SiCl4 post valve closed
11/10/2010	7:05:17 PM	Bubbler valve closed
11/10/2010	7:05:17 PM	Main Vac valve opened
11/10/2010	7:05:17 PM	Bypass valve opened
11/10/2010	7:05:17 PM	Helium MFC set to  0.000000
11/10/2010	7:05:17 PM	H2 MFC set to  0.000000
11/10/2010	7:05:17 PM	BCl3 MFC set to  0.000000
11/10/2010	7:05:17 PM	PHl3 MFC set to  0.000000
11/10/2010	7:05:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:05:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:05:17 PM	Tube furnace set to 0
11/10/2010	7:06:17 PM	H2 valve closed
11/10/2010	7:06:17 PM	BCl3 valve closed
11/10/2010	7:06:17 PM	PH3 valve closed
11/10/2010	7:06:17 PM	SiCl4 pre valve closed
11/10/2010	7:06:17 PM	SiCl4 post valve closed
11/10/2010	7:06:17 PM	Bubbler valve closed
11/10/2010	7:06:17 PM	Helium valve opened
11/10/2010	7:06:17 PM	Main Vac valve opened
11/10/2010	7:06:17 PM	Bypass valve opened
11/10/2010	7:06:17 PM	Helium MFC set to  100.000000
11/10/2010	7:06:17 PM	H2 MFC set to  0.000000
11/10/2010	7:06:17 PM	BCl3 MFC set to  0.000000
11/10/2010	7:06:17 PM	PHl3 MFC set to  0.000000
11/10/2010	7:06:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:06:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:06:17 PM	Tube furnace set to 0
11/10/2010	7:07:17 PM	Helium valve closed
11/10/2010	7:07:17 PM	H2 valve closed
11/10/2010	7:07:17 PM	BCl3 valve closed
11/10/2010	7:07:17 PM	PH3 valve closed
11/10/2010	7:07:17 PM	SiCl4 pre valve closed
11/10/2010	7:07:17 PM	SiCl4 post valve closed
11/10/2010	7:07:17 PM	Bubbler valve closed
11/10/2010	7:07:17 PM	Main Vac valve opened
11/10/2010	7:07:17 PM	Bypass valve opened
11/10/2010	7:07:17 PM	Helium MFC set to  0.000000
11/10/2010	7:07:17 PM	H2 MFC set to  0.000000
11/10/2010	7:07:17 PM	BCl3 MFC set to  0.000000
11/10/2010	7:07:17 PM	PHl3 MFC set to  0.000000
11/10/2010	7:07:17 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:07:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:07:17 PM	Tube furnace set to 0
11/10/2010	7:07:18 PM	Run finished at 7:07 PM
11/10/2010	7:07:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	7:18:11 PM	Bypass valve closed
11/10/2010	7:18:12 PM	Main Vac valve closed
11/10/2010	7:19:00 PM	Recipe started at 7:19 PM
11/10/2010	7:19:00 PM	Helium valve closed
11/10/2010	7:19:00 PM	BCl3 valve closed
11/10/2010	7:19:00 PM	PH3 valve closed
11/10/2010	7:19:00 PM	SiCl4 pre valve closed
11/10/2010	7:19:00 PM	SiCl4 post valve closed
11/10/2010	7:19:00 PM	Main Vac valve closed
11/10/2010	7:19:00 PM	Bypass valve closed
11/10/2010	7:19:00 PM	Bubbler valve closed
11/10/2010	7:19:00 PM	H2 valve opened
11/10/2010	7:19:00 PM	Helium MFC set to  0.000000
11/10/2010	7:19:00 PM	H2 MFC set to  500.000000
11/10/2010	7:19:00 PM	BCl3 MFC set to  0.000000
11/10/2010	7:19:00 PM	PHl3 MFC set to  0.000000
11/10/2010	7:19:00 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:19:00 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:19:01 PM	Tube furnace set to 0
11/10/2010	7:20:22 PM	Helium valve closed
11/10/2010	7:20:22 PM	BCl3 valve closed
11/10/2010	7:20:22 PM	PH3 valve closed
11/10/2010	7:20:22 PM	SiCl4 pre valve closed
11/10/2010	7:20:22 PM	SiCl4 post valve closed
11/10/2010	7:20:22 PM	Main Vac valve closed
11/10/2010	7:20:22 PM	Bypass valve closed
11/10/2010	7:20:22 PM	H2 valve opened
11/10/2010	7:20:22 PM	Bubbler valve opened
11/10/2010	7:20:22 PM	Helium MFC set to  0.000000
11/10/2010	7:20:22 PM	H2 MFC set to  500.000000
11/10/2010	7:20:22 PM	BCl3 MFC set to  0.000000
11/10/2010	7:20:22 PM	PHl3 MFC set to  0.000000
11/10/2010	7:20:22 PM	SiCl4 MFC set to  0.000000
11/10/2010	7:20:22 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:20:22 PM	Tube furnace set to 1000
11/10/2010	7:40:22 PM	Helium valve closed
11/10/2010	7:40:22 PM	BCl3 valve closed
11/10/2010	7:40:22 PM	Main Vac valve closed
11/10/2010	7:40:22 PM	Bypass valve closed
11/10/2010	7:40:22 PM	H2 valve opened
11/10/2010	7:40:22 PM	PH3 valve opened
11/10/2010	7:40:22 PM	SiCl4 pre valve opened
11/10/2010	7:40:22 PM	SiCl4 post valve opened
11/10/2010	7:40:22 PM	Bubbler valve opened
11/10/2010	7:40:22 PM	Helium MFC set to  0.000000
11/10/2010	7:40:22 PM	H2 MFC set to  500.000000
11/10/2010	7:40:22 PM	BCl3 MFC set to  0.000000
11/10/2010	7:40:22 PM	PHl3 MFC set to  1.000000
11/10/2010	7:40:22 PM	SiCl4 MFC set to  50.000000
11/10/2010	7:40:22 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	7:40:22 PM	Tube furnace set to 1000
11/10/2010	8:10:22 PM	H2 valve closed
11/10/2010	8:10:22 PM	BCl3 valve closed
11/10/2010	8:10:22 PM	PH3 valve closed
11/10/2010	8:10:22 PM	SiCl4 pre valve closed
11/10/2010	8:10:22 PM	SiCl4 post valve closed
11/10/2010	8:10:22 PM	Main Vac valve closed
11/10/2010	8:10:22 PM	Bypass valve closed
11/10/2010	8:10:22 PM	Helium valve opened
11/10/2010	8:10:22 PM	Bubbler valve opened
11/10/2010	8:10:22 PM	Helium MFC set to  500.000000
11/10/2010	8:10:22 PM	H2 MFC set to  0.000000
11/10/2010	8:10:22 PM	BCl3 MFC set to  0.000000
11/10/2010	8:10:22 PM	PHl3 MFC set to  0.000000
11/10/2010	8:10:22 PM	SiCl4 MFC set to  0.000000
11/10/2010	8:10:22 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	8:10:22 PM	Tube furnace set to 0
11/10/2010	8:30:22 PM	Helium valve closed
11/10/2010	8:30:22 PM	H2 valve closed
11/10/2010	8:30:22 PM	BCl3 valve closed
11/10/2010	8:30:22 PM	PH3 valve closed
11/10/2010	8:30:22 PM	SiCl4 pre valve closed
11/10/2010	8:30:22 PM	SiCl4 post valve closed
11/10/2010	8:30:22 PM	Main Vac valve closed
11/10/2010	8:30:22 PM	Bypass valve closed
11/10/2010	8:30:22 PM	Bubbler valve closed
11/10/2010	8:30:22 PM	Helium MFC set to  0.000000
11/10/2010	8:30:22 PM	H2 MFC set to  0.000000
11/10/2010	8:30:22 PM	BCl3 MFC set to  0.000000
11/10/2010	8:30:22 PM	PHl3 MFC set to  0.000000
11/10/2010	8:30:22 PM	SiCl4 MFC set to  0.000000
11/10/2010	8:30:22 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	8:30:23 PM	Tube furnace set to 0
11/10/2010	8:30:23 PM	Run finished at 8:30 PM
11/10/2010	10:32:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	10:32:28 PM	Recipe started at 10:32 PM
11/10/2010	10:32:28 PM	H2 valve closed
11/10/2010	10:32:28 PM	BCl3 valve closed
11/10/2010	10:32:28 PM	PH3 valve closed
11/10/2010	10:32:28 PM	SiCl4 pre valve closed
11/10/2010	10:32:28 PM	SiCl4 post valve closed
11/10/2010	10:32:28 PM	Main Vac valve closed
11/10/2010	10:32:28 PM	Bypass valve closed
11/10/2010	10:32:28 PM	Bubbler valve closed
11/10/2010	10:32:28 PM	Helium valve opened
11/10/2010	10:32:28 PM	Helium MFC set to  500.000000
11/10/2010	10:32:28 PM	H2 MFC set to  0.000000
11/10/2010	10:32:28 PM	BCl3 MFC set to  0.000000
11/10/2010	10:32:28 PM	PHl3 MFC set to  0.000000
11/10/2010	10:32:28 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:32:28 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:32:28 PM	Tube furnace set to 0
11/10/2010	10:32:35 PM	Helium valve closed
11/10/2010	10:32:35 PM	H2 valve closed
11/10/2010	10:32:35 PM	BCl3 valve closed
11/10/2010	10:32:35 PM	PH3 valve closed
11/10/2010	10:32:35 PM	SiCl4 pre valve closed
11/10/2010	10:32:35 PM	SiCl4 post valve closed
11/10/2010	10:32:35 PM	Main Vac valve closed
11/10/2010	10:32:35 PM	Bypass valve closed
11/10/2010	10:32:35 PM	Bubbler valve closed
11/10/2010	10:32:35 PM	Helium MFC set to  0.000000
11/10/2010	10:32:35 PM	H2 MFC set to  0.000000
11/10/2010	10:32:35 PM	BCl3 MFC set to  0.000000
11/10/2010	10:32:35 PM	PHl3 MFC set to  0.000000
11/10/2010	10:32:35 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:32:35 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:32:35 PM	Tube furnace set to 0
11/10/2010	10:32:36 PM	Run finished at 10:32 PM
11/10/2010	10:32:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/10/2010	10:36:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	10:36:54 PM	Recipe started at 10:36 PM
11/10/2010	10:36:55 PM	Helium valve closed
11/10/2010	10:36:55 PM	H2 valve closed
11/10/2010	10:36:55 PM	BCl3 valve closed
11/10/2010	10:36:55 PM	PH3 valve closed
11/10/2010	10:36:55 PM	SiCl4 pre valve closed
11/10/2010	10:36:55 PM	SiCl4 post valve closed
11/10/2010	10:36:55 PM	Main Vac valve closed
11/10/2010	10:36:55 PM	Bubbler valve closed
11/10/2010	10:36:55 PM	Bypass valve opened
11/10/2010	10:36:55 PM	Helium MFC set to  0.000000
11/10/2010	10:36:55 PM	H2 MFC set to  0.000000
11/10/2010	10:36:55 PM	BCl3 MFC set to  0.000000
11/10/2010	10:36:55 PM	PHl3 MFC set to  0.000000
11/10/2010	10:36:55 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:36:55 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:36:55 PM	Tube furnace set to 0
11/10/2010	10:37:52 PM	Helium valve closed
11/10/2010	10:37:52 PM	H2 valve closed
11/10/2010	10:37:52 PM	BCl3 valve closed
11/10/2010	10:37:52 PM	PH3 valve closed
11/10/2010	10:37:52 PM	SiCl4 pre valve closed
11/10/2010	10:37:52 PM	SiCl4 post valve closed
11/10/2010	10:37:52 PM	Bubbler valve closed
11/10/2010	10:37:52 PM	Main Vac valve opened
11/10/2010	10:37:52 PM	Bypass valve opened
11/10/2010	10:37:52 PM	Helium MFC set to  0.000000
11/10/2010	10:37:52 PM	H2 MFC set to  0.000000
11/10/2010	10:37:52 PM	BCl3 MFC set to  0.000000
11/10/2010	10:37:52 PM	PHl3 MFC set to  0.000000
11/10/2010	10:37:52 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:37:52 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:37:53 PM	Tube furnace set to 0
11/10/2010	10:37:53 PM	Run finished at 10:37 PM
11/10/2010	10:37:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2010	10:38:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/10/2010	10:38:44 PM	Recipe started at 10:38 PM
11/10/2010	10:38:44 PM	Helium valve closed
11/10/2010	10:38:44 PM	H2 valve closed
11/10/2010	10:38:44 PM	BCl3 valve closed
11/10/2010	10:38:44 PM	PH3 valve closed
11/10/2010	10:38:44 PM	SiCl4 pre valve closed
11/10/2010	10:38:44 PM	SiCl4 post valve closed
11/10/2010	10:38:44 PM	Main Vac valve closed
11/10/2010	10:38:44 PM	Bubbler valve closed
11/10/2010	10:38:44 PM	Bypass valve opened
11/10/2010	10:38:44 PM	Helium MFC set to  0.000000
11/10/2010	10:38:44 PM	H2 MFC set to  0.000000
11/10/2010	10:38:44 PM	BCl3 MFC set to  0.000000
11/10/2010	10:38:44 PM	PHl3 MFC set to  0.000000
11/10/2010	10:38:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:38:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:38:44 PM	Tube furnace set to 0
11/10/2010	10:38:44 PM	Helium valve closed
11/10/2010	10:38:44 PM	H2 valve closed
11/10/2010	10:38:44 PM	BCl3 valve closed
11/10/2010	10:38:44 PM	PH3 valve closed
11/10/2010	10:38:44 PM	SiCl4 pre valve closed
11/10/2010	10:38:44 PM	SiCl4 post valve closed
11/10/2010	10:38:44 PM	Bubbler valve closed
11/10/2010	10:38:44 PM	Main Vac valve opened
11/10/2010	10:38:44 PM	Bypass valve opened
11/10/2010	10:38:44 PM	Helium MFC set to  0.000000
11/10/2010	10:38:44 PM	H2 MFC set to  0.000000
11/10/2010	10:38:44 PM	BCl3 MFC set to  0.000000
11/10/2010	10:38:44 PM	PHl3 MFC set to  0.000000
11/10/2010	10:38:44 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:38:44 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:38:45 PM	Tube furnace set to 0
11/10/2010	10:39:45 PM	H2 valve closed
11/10/2010	10:39:45 PM	BCl3 valve closed
11/10/2010	10:39:45 PM	PH3 valve closed
11/10/2010	10:39:45 PM	SiCl4 pre valve closed
11/10/2010	10:39:45 PM	SiCl4 post valve closed
11/10/2010	10:39:45 PM	Bubbler valve closed
11/10/2010	10:39:45 PM	Helium valve opened
11/10/2010	10:39:45 PM	Main Vac valve opened
11/10/2010	10:39:45 PM	Bypass valve opened
11/10/2010	10:39:45 PM	Helium MFC set to  100.000000
11/10/2010	10:39:45 PM	H2 MFC set to  0.000000
11/10/2010	10:39:45 PM	BCl3 MFC set to  0.000000
11/10/2010	10:39:45 PM	PHl3 MFC set to  0.000000
11/10/2010	10:39:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:39:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:39:45 PM	Tube furnace set to 0
11/10/2010	10:40:45 PM	Helium valve closed
11/10/2010	10:40:45 PM	H2 valve closed
11/10/2010	10:40:45 PM	BCl3 valve closed
11/10/2010	10:40:45 PM	PH3 valve closed
11/10/2010	10:40:45 PM	SiCl4 pre valve closed
11/10/2010	10:40:45 PM	SiCl4 post valve closed
11/10/2010	10:40:45 PM	Bubbler valve closed
11/10/2010	10:40:45 PM	Main Vac valve opened
11/10/2010	10:40:45 PM	Bypass valve opened
11/10/2010	10:40:45 PM	Helium MFC set to  0.000000
11/10/2010	10:40:45 PM	H2 MFC set to  0.000000
11/10/2010	10:40:45 PM	BCl3 MFC set to  0.000000
11/10/2010	10:40:45 PM	PHl3 MFC set to  0.000000
11/10/2010	10:40:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:40:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:40:45 PM	Tube furnace set to 0
11/10/2010	10:41:45 PM	H2 valve closed
11/10/2010	10:41:45 PM	BCl3 valve closed
11/10/2010	10:41:45 PM	PH3 valve closed
11/10/2010	10:41:45 PM	SiCl4 pre valve closed
11/10/2010	10:41:45 PM	SiCl4 post valve closed
11/10/2010	10:41:45 PM	Bubbler valve closed
11/10/2010	10:41:45 PM	Helium valve opened
11/10/2010	10:41:45 PM	Main Vac valve opened
11/10/2010	10:41:45 PM	Bypass valve opened
11/10/2010	10:41:45 PM	Helium MFC set to  100.000000
11/10/2010	10:41:45 PM	H2 MFC set to  0.000000
11/10/2010	10:41:45 PM	BCl3 MFC set to  0.000000
11/10/2010	10:41:45 PM	PHl3 MFC set to  0.000000
11/10/2010	10:41:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:41:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:41:45 PM	Tube furnace set to 0
11/10/2010	10:42:45 PM	Helium valve closed
11/10/2010	10:42:45 PM	H2 valve closed
11/10/2010	10:42:45 PM	BCl3 valve closed
11/10/2010	10:42:45 PM	PH3 valve closed
11/10/2010	10:42:45 PM	SiCl4 pre valve closed
11/10/2010	10:42:45 PM	SiCl4 post valve closed
11/10/2010	10:42:45 PM	Bubbler valve closed
11/10/2010	10:42:45 PM	Main Vac valve opened
11/10/2010	10:42:45 PM	Bypass valve opened
11/10/2010	10:42:45 PM	Helium MFC set to  0.000000
11/10/2010	10:42:45 PM	H2 MFC set to  0.000000
11/10/2010	10:42:45 PM	BCl3 MFC set to  0.000000
11/10/2010	10:42:45 PM	PHl3 MFC set to  0.000000
11/10/2010	10:42:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:42:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:42:45 PM	Tube furnace set to 0
11/10/2010	10:43:45 PM	H2 valve closed
11/10/2010	10:43:45 PM	BCl3 valve closed
11/10/2010	10:43:45 PM	PH3 valve closed
11/10/2010	10:43:45 PM	SiCl4 pre valve closed
11/10/2010	10:43:45 PM	SiCl4 post valve closed
11/10/2010	10:43:45 PM	Bubbler valve closed
11/10/2010	10:43:45 PM	Helium valve opened
11/10/2010	10:43:45 PM	Main Vac valve opened
11/10/2010	10:43:45 PM	Bypass valve opened
11/10/2010	10:43:45 PM	Helium MFC set to  100.000000
11/10/2010	10:43:45 PM	H2 MFC set to  0.000000
11/10/2010	10:43:45 PM	BCl3 MFC set to  0.000000
11/10/2010	10:43:45 PM	PHl3 MFC set to  0.000000
11/10/2010	10:43:45 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:43:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:43:46 PM	Tube furnace set to 0
11/10/2010	10:44:46 PM	Helium valve closed
11/10/2010	10:44:46 PM	H2 valve closed
11/10/2010	10:44:46 PM	BCl3 valve closed
11/10/2010	10:44:46 PM	PH3 valve closed
11/10/2010	10:44:46 PM	SiCl4 pre valve closed
11/10/2010	10:44:46 PM	SiCl4 post valve closed
11/10/2010	10:44:46 PM	Bubbler valve closed
11/10/2010	10:44:46 PM	Main Vac valve opened
11/10/2010	10:44:46 PM	Bypass valve opened
11/10/2010	10:44:46 PM	Helium MFC set to  0.000000
11/10/2010	10:44:46 PM	H2 MFC set to  0.000000
11/10/2010	10:44:46 PM	BCl3 MFC set to  0.000000
11/10/2010	10:44:46 PM	PHl3 MFC set to  0.000000
11/10/2010	10:44:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:44:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:44:46 PM	Tube furnace set to 0
11/10/2010	10:45:46 PM	H2 valve closed
11/10/2010	10:45:46 PM	BCl3 valve closed
11/10/2010	10:45:46 PM	PH3 valve closed
11/10/2010	10:45:46 PM	SiCl4 pre valve closed
11/10/2010	10:45:46 PM	SiCl4 post valve closed
11/10/2010	10:45:46 PM	Bubbler valve closed
11/10/2010	10:45:46 PM	Helium valve opened
11/10/2010	10:45:46 PM	Main Vac valve opened
11/10/2010	10:45:46 PM	Bypass valve opened
11/10/2010	10:45:46 PM	Helium MFC set to  100.000000
11/10/2010	10:45:46 PM	H2 MFC set to  0.000000
11/10/2010	10:45:46 PM	BCl3 MFC set to  0.000000
11/10/2010	10:45:46 PM	PHl3 MFC set to  0.000000
11/10/2010	10:45:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:45:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:45:46 PM	Tube furnace set to 0
11/10/2010	10:46:46 PM	Helium valve closed
11/10/2010	10:46:46 PM	H2 valve closed
11/10/2010	10:46:46 PM	BCl3 valve closed
11/10/2010	10:46:46 PM	PH3 valve closed
11/10/2010	10:46:46 PM	SiCl4 pre valve closed
11/10/2010	10:46:46 PM	SiCl4 post valve closed
11/10/2010	10:46:46 PM	Bubbler valve closed
11/10/2010	10:46:46 PM	Main Vac valve opened
11/10/2010	10:46:46 PM	Bypass valve opened
11/10/2010	10:46:46 PM	Helium MFC set to  0.000000
11/10/2010	10:46:46 PM	H2 MFC set to  0.000000
11/10/2010	10:46:46 PM	BCl3 MFC set to  0.000000
11/10/2010	10:46:46 PM	PHl3 MFC set to  0.000000
11/10/2010	10:46:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:46:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:46:46 PM	Tube furnace set to 0
11/10/2010	10:47:46 PM	H2 valve closed
11/10/2010	10:47:46 PM	BCl3 valve closed
11/10/2010	10:47:46 PM	PH3 valve closed
11/10/2010	10:47:46 PM	SiCl4 pre valve closed
11/10/2010	10:47:46 PM	SiCl4 post valve closed
11/10/2010	10:47:46 PM	Bubbler valve closed
11/10/2010	10:47:46 PM	Helium valve opened
11/10/2010	10:47:46 PM	Main Vac valve opened
11/10/2010	10:47:46 PM	Bypass valve opened
11/10/2010	10:47:46 PM	Helium MFC set to  100.000000
11/10/2010	10:47:46 PM	H2 MFC set to  0.000000
11/10/2010	10:47:46 PM	BCl3 MFC set to  0.000000
11/10/2010	10:47:46 PM	PHl3 MFC set to  0.000000
11/10/2010	10:47:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:47:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:47:46 PM	Tube furnace set to 0
11/10/2010	10:48:46 PM	Helium valve closed
11/10/2010	10:48:46 PM	H2 valve closed
11/10/2010	10:48:46 PM	BCl3 valve closed
11/10/2010	10:48:46 PM	PH3 valve closed
11/10/2010	10:48:46 PM	SiCl4 pre valve closed
11/10/2010	10:48:46 PM	SiCl4 post valve closed
11/10/2010	10:48:46 PM	Bubbler valve closed
11/10/2010	10:48:46 PM	Main Vac valve opened
11/10/2010	10:48:46 PM	Bypass valve opened
11/10/2010	10:48:46 PM	Helium MFC set to  0.000000
11/10/2010	10:48:46 PM	H2 MFC set to  0.000000
11/10/2010	10:48:46 PM	BCl3 MFC set to  0.000000
11/10/2010	10:48:46 PM	PHl3 MFC set to  0.000000
11/10/2010	10:48:46 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:48:46 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:48:47 PM	Tube furnace set to 0
11/10/2010	10:49:47 PM	H2 valve closed
11/10/2010	10:49:47 PM	BCl3 valve closed
11/10/2010	10:49:47 PM	PH3 valve closed
11/10/2010	10:49:47 PM	SiCl4 pre valve closed
11/10/2010	10:49:47 PM	SiCl4 post valve closed
11/10/2010	10:49:47 PM	Bubbler valve closed
11/10/2010	10:49:47 PM	Helium valve opened
11/10/2010	10:49:47 PM	Main Vac valve opened
11/10/2010	10:49:47 PM	Bypass valve opened
11/10/2010	10:49:47 PM	Helium MFC set to  100.000000
11/10/2010	10:49:47 PM	H2 MFC set to  0.000000
11/10/2010	10:49:47 PM	BCl3 MFC set to  0.000000
11/10/2010	10:49:47 PM	PHl3 MFC set to  0.000000
11/10/2010	10:49:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:49:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:49:47 PM	Tube furnace set to 0
11/10/2010	10:50:47 PM	Helium valve closed
11/10/2010	10:50:47 PM	H2 valve closed
11/10/2010	10:50:47 PM	BCl3 valve closed
11/10/2010	10:50:47 PM	PH3 valve closed
11/10/2010	10:50:47 PM	SiCl4 pre valve closed
11/10/2010	10:50:47 PM	SiCl4 post valve closed
11/10/2010	10:50:47 PM	Bubbler valve closed
11/10/2010	10:50:47 PM	Main Vac valve opened
11/10/2010	10:50:47 PM	Bypass valve opened
11/10/2010	10:50:47 PM	Helium MFC set to  0.000000
11/10/2010	10:50:47 PM	H2 MFC set to  0.000000
11/10/2010	10:50:47 PM	BCl3 MFC set to  0.000000
11/10/2010	10:50:47 PM	PHl3 MFC set to  0.000000
11/10/2010	10:50:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:50:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:50:47 PM	Tube furnace set to 0
11/10/2010	10:51:47 PM	H2 valve closed
11/10/2010	10:51:47 PM	BCl3 valve closed
11/10/2010	10:51:47 PM	PH3 valve closed
11/10/2010	10:51:47 PM	SiCl4 pre valve closed
11/10/2010	10:51:47 PM	SiCl4 post valve closed
11/10/2010	10:51:47 PM	Bubbler valve closed
11/10/2010	10:51:47 PM	Helium valve opened
11/10/2010	10:51:47 PM	Main Vac valve opened
11/10/2010	10:51:47 PM	Bypass valve opened
11/10/2010	10:51:47 PM	Helium MFC set to  100.000000
11/10/2010	10:51:47 PM	H2 MFC set to  0.000000
11/10/2010	10:51:47 PM	BCl3 MFC set to  0.000000
11/10/2010	10:51:47 PM	PHl3 MFC set to  0.000000
11/10/2010	10:51:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:51:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:51:47 PM	Tube furnace set to 0
11/10/2010	10:52:47 PM	Helium valve closed
11/10/2010	10:52:47 PM	H2 valve closed
11/10/2010	10:52:47 PM	BCl3 valve closed
11/10/2010	10:52:47 PM	PH3 valve closed
11/10/2010	10:52:47 PM	SiCl4 pre valve closed
11/10/2010	10:52:47 PM	SiCl4 post valve closed
11/10/2010	10:52:47 PM	Bubbler valve closed
11/10/2010	10:52:47 PM	Main Vac valve opened
11/10/2010	10:52:47 PM	Bypass valve opened
11/10/2010	10:52:47 PM	Helium MFC set to  0.000000
11/10/2010	10:52:47 PM	H2 MFC set to  0.000000
11/10/2010	10:52:47 PM	BCl3 MFC set to  0.000000
11/10/2010	10:52:47 PM	PHl3 MFC set to  0.000000
11/10/2010	10:52:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:52:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:52:47 PM	Tube furnace set to 0
11/10/2010	10:53:47 PM	H2 valve closed
11/10/2010	10:53:47 PM	BCl3 valve closed
11/10/2010	10:53:47 PM	PH3 valve closed
11/10/2010	10:53:47 PM	SiCl4 pre valve closed
11/10/2010	10:53:47 PM	SiCl4 post valve closed
11/10/2010	10:53:47 PM	Bubbler valve closed
11/10/2010	10:53:47 PM	Helium valve opened
11/10/2010	10:53:47 PM	Main Vac valve opened
11/10/2010	10:53:47 PM	Bypass valve opened
11/10/2010	10:53:47 PM	Helium MFC set to  100.000000
11/10/2010	10:53:47 PM	H2 MFC set to  0.000000
11/10/2010	10:53:47 PM	BCl3 MFC set to  0.000000
11/10/2010	10:53:47 PM	PHl3 MFC set to  0.000000
11/10/2010	10:53:47 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:53:47 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:53:48 PM	Tube furnace set to 0
11/10/2010	10:54:48 PM	Helium valve closed
11/10/2010	10:54:48 PM	H2 valve closed
11/10/2010	10:54:48 PM	BCl3 valve closed
11/10/2010	10:54:48 PM	PH3 valve closed
11/10/2010	10:54:48 PM	SiCl4 pre valve closed
11/10/2010	10:54:48 PM	SiCl4 post valve closed
11/10/2010	10:54:48 PM	Bubbler valve closed
11/10/2010	10:54:48 PM	Main Vac valve opened
11/10/2010	10:54:48 PM	Bypass valve opened
11/10/2010	10:54:48 PM	Helium MFC set to  0.000000
11/10/2010	10:54:48 PM	H2 MFC set to  0.000000
11/10/2010	10:54:48 PM	BCl3 MFC set to  0.000000
11/10/2010	10:54:48 PM	PHl3 MFC set to  0.000000
11/10/2010	10:54:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:54:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:54:48 PM	Tube furnace set to 0
11/10/2010	10:55:48 PM	H2 valve closed
11/10/2010	10:55:48 PM	BCl3 valve closed
11/10/2010	10:55:48 PM	PH3 valve closed
11/10/2010	10:55:48 PM	SiCl4 pre valve closed
11/10/2010	10:55:48 PM	SiCl4 post valve closed
11/10/2010	10:55:48 PM	Bubbler valve closed
11/10/2010	10:55:48 PM	Helium valve opened
11/10/2010	10:55:48 PM	Main Vac valve opened
11/10/2010	10:55:48 PM	Bypass valve opened
11/10/2010	10:55:48 PM	Helium MFC set to  100.000000
11/10/2010	10:55:48 PM	H2 MFC set to  0.000000
11/10/2010	10:55:48 PM	BCl3 MFC set to  0.000000
11/10/2010	10:55:48 PM	PHl3 MFC set to  0.000000
11/10/2010	10:55:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:55:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:55:48 PM	Tube furnace set to 0
11/10/2010	10:56:48 PM	Helium valve closed
11/10/2010	10:56:48 PM	H2 valve closed
11/10/2010	10:56:48 PM	BCl3 valve closed
11/10/2010	10:56:48 PM	PH3 valve closed
11/10/2010	10:56:48 PM	SiCl4 pre valve closed
11/10/2010	10:56:48 PM	SiCl4 post valve closed
11/10/2010	10:56:48 PM	Bubbler valve closed
11/10/2010	10:56:48 PM	Main Vac valve opened
11/10/2010	10:56:48 PM	Bypass valve opened
11/10/2010	10:56:48 PM	Helium MFC set to  0.000000
11/10/2010	10:56:48 PM	H2 MFC set to  0.000000
11/10/2010	10:56:48 PM	BCl3 MFC set to  0.000000
11/10/2010	10:56:48 PM	PHl3 MFC set to  0.000000
11/10/2010	10:56:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:56:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:56:48 PM	Tube furnace set to 0
11/10/2010	10:57:48 PM	H2 valve closed
11/10/2010	10:57:48 PM	BCl3 valve closed
11/10/2010	10:57:48 PM	PH3 valve closed
11/10/2010	10:57:48 PM	SiCl4 pre valve closed
11/10/2010	10:57:48 PM	SiCl4 post valve closed
11/10/2010	10:57:48 PM	Bubbler valve closed
11/10/2010	10:57:48 PM	Helium valve opened
11/10/2010	10:57:48 PM	Main Vac valve opened
11/10/2010	10:57:48 PM	Bypass valve opened
11/10/2010	10:57:48 PM	Helium MFC set to  100.000000
11/10/2010	10:57:48 PM	H2 MFC set to  0.000000
11/10/2010	10:57:48 PM	BCl3 MFC set to  0.000000
11/10/2010	10:57:48 PM	PHl3 MFC set to  0.000000
11/10/2010	10:57:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:57:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:57:48 PM	Tube furnace set to 0
11/10/2010	10:58:48 PM	Helium valve closed
11/10/2010	10:58:48 PM	H2 valve closed
11/10/2010	10:58:48 PM	BCl3 valve closed
11/10/2010	10:58:48 PM	PH3 valve closed
11/10/2010	10:58:48 PM	SiCl4 pre valve closed
11/10/2010	10:58:48 PM	SiCl4 post valve closed
11/10/2010	10:58:48 PM	Bubbler valve closed
11/10/2010	10:58:48 PM	Main Vac valve opened
11/10/2010	10:58:48 PM	Bypass valve opened
11/10/2010	10:58:48 PM	Helium MFC set to  0.000000
11/10/2010	10:58:48 PM	H2 MFC set to  0.000000
11/10/2010	10:58:48 PM	BCl3 MFC set to  0.000000
11/10/2010	10:58:48 PM	PHl3 MFC set to  0.000000
11/10/2010	10:58:48 PM	SiCl4 MFC set to  0.000000
11/10/2010	10:58:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2010	10:58:49 PM	Tube furnace set to 0
11/10/2010	10:58:50 PM	Run finished at 10:58 PM
11/10/2010	10:58:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
